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Year of Publication 28.11.2013
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Year of Publication 04.04.2013
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Year of Publication 14.03.2013
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Year of Publication 21.11.2012
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Year of Publication 21.11.2012
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Siliziumkarbid-Epitaxiesubstrat und Verfahren zur Herstellung einer Siliziumkarbid-Halbleitervorrichtung
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Year of Publication 05.07.2018
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SILICON CARBIDE SUBSTRATE PRODUCTION METHOD AND SILICON CARBIDE SUBSTRATE
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Year of Publication 05.09.2012
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Year of Publication 05.09.2012
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Silicon carbide epitaxial substrate and method for manufacturing silicon carbide semiconductor device
KANBARA KENJI, NISHIGUCHI TARO, WADA KEIJI, TERAO TAKEMI, ITOH HIRONORI
Year of Publication 11.05.2018
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Year of Publication 11.05.2018
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MANUFACTURING APPARATUS AND METHOD OF SILICON CARBIDE SINGLE CRYSTAL SUBSTRATE
NISHIGUCHI TARO, KAWASE TOMOHIRO, SASAKI MAKOTO, FUJIWARA SHINSUKE, OI NAOKI, UEDA SHUNSAKU, HORI TSUTOMU
Year of Publication 04.09.2014
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Year of Publication 04.09.2014
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