Epitaxial wafer and method for manufacturing same
Nishiguchi, Taro, Hatayama, Tomoaki, Genba, Jun, Doi, Hideyuki, Itoh, Hironori
Year of Publication 07.04.2020
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Year of Publication 07.04.2020
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Epitaxialer Wafer
Nishiguchi, Taro, Hatayama, Tomoaki, Genba, Jun, Doi, Hideyuki, Itoh, Hironori
Year of Publication 22.08.2024
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Year of Publication 22.08.2024
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Silicon carbide epitaxial substrate and method for manufacturing silicon carbide semiconductor device
Nishiguchi, Taro, Wada, Keiji, Terao, Takemi, Itoh, Hironori, Kanbara, Kenji
Year of Publication 27.08.2019
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Year of Publication 27.08.2019
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SILICON CARBIDE EPITAXIAL SUBSTRATE AND METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE
Nishiguchi, Taro, Wada, Keiji, Terao, Takemi, Itoh, Hironori, Kanbara, Kenji
Year of Publication 17.01.2019
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Year of Publication 17.01.2019
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Semiconductor device and method for manufacturing same
Nishiguchi, Taro, Harada, Shin, Miyazaki, Tomihito, Wada, Keiji, Okita, Kyoko, Sasaki, Makoto
Year of Publication 11.08.2020
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Year of Publication 11.08.2020
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