Method for producing strained Si-SOI substrate and strained Si-SOI substrate produced by the same
Ninomiya, Masaharu, Matsumoto, Koji, Nakamae, Masahiko, Miyao, Masanobu
Year of Publication 12.07.2011
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Year of Publication 12.07.2011
Patent
Characterization of mirror-polished silicon wafers by Makyoh method
Tokura, Seitaro, Fujino, Nobukatsu, Ninomiya, Masaharu, Masuda, Kenji
Published in Journal of crystal growth (01.06.1990)
Published in Journal of crystal growth (01.06.1990)
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Journal Article
Conference Proceeding
Method for manufacturing semiconductor wafer including a strained silicon layer
Ninomiya, Masaharu, Matsumoto, Koji, Nakamae, Masahiko, Miyao, Masanobu, Sadoh, Taizoh
Year of Publication 03.08.2010
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Year of Publication 03.08.2010
Patent