Influence of pre-polishing process on site flatness values of polished wafers
Zhong, Genghang, Ning, Yongduo, Zhou, Qigang, Bian, Yongzhi, Wang, Xin, Qu, Xiang, Wang, Lei, Zhao, Erjing
Published in Materials science in semiconductor processing (01.09.2017)
Published in Materials science in semiconductor processing (01.09.2017)
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Journal Article
Improving a lapping process using robust parameter design and run-to-run control
Ning, YongDuo, Bian, YongZhi, Liu, Bin
Published in Journal of industrial and production engineering (01.03.2012)
Published in Journal of industrial and production engineering (01.03.2012)
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Journal Article
Method for prolonging service life of silicon single crystal czochralski furnace heater
BIAN YONGZHI, XU JIPING, YAN JUNYAO, LI YINGTAO, FANG FENG, NING YONGDUO
Year of Publication 12.05.2023
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Year of Publication 12.05.2023
Patent
Method for preparing silicon substrate with ultrahigh resistivity by Czochralski method
ZHU XIAOTONG, XU JIPING, LI JUNHONG, YAN JUNYAO, ZHANG HUAN, ZHANG JIANHUA, FANG FENG, NING YONGDUO, ZHONG GENGHANG, LIAN QINGWEI
Year of Publication 09.06.2023
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Year of Publication 09.06.2023
Patent
Detection device and method for assisting in adjusting working disc of wafer processing equipment
BIAN YONGZHI, XU JIPING, CHENG FENGLING, ZHENG YU, NING YONGDUO, ZHONG GENGHANG
Year of Publication 18.06.2021
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Year of Publication 18.06.2021
Patent
Preparation method of silicon-based silicon dioxide back sealing film
BIAN YONGZHI, XU JIPING, SHI XUNDA, CAI LIYAN, NING YONGDUO, ZHONG GENGHANG, BAI XUE, LU JINJUN
Year of Publication 18.06.2021
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Year of Publication 18.06.2021
Patent
Method for reducing stress of silicon-based back-sealing polished wafer
BIAN YONGZHI, ZHAO JIANGWEI, XU JIPING, SHI XUNDA, NING YONGDUO, ZHONG GENGHANG, BAI XUE, CHEN LUFENG
Year of Publication 18.06.2021
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Year of Publication 18.06.2021
Patent
Preparation method of silicon substrate polished wafer for bonding process
HAN PING, BIAN YONGZHI, WANG XIN, ZHU XIAOTONG, XU JIPING, LI JUNHONG, LIN LIN, YAN JUNYAO, ZHANG JIANHUA, NING YONGDUO, ZHONG GENGHANG, TIAN FENGGE
Year of Publication 15.04.2022
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Year of Publication 15.04.2022
Patent
Method and device for removing cut oxidation films of 8-inch wafers
LIU BIN, BIAN YONGZHI, XU JIPING, JIE XIAOBING, NING YONGDUO, SUN HONGBO, ZHANG JING
Year of Publication 14.01.2015
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Year of Publication 14.01.2015
Patent
Cooling device and method for silicon wafer oxygen donor elimination heat treatment process
BIAN YONGZHI, XU JIPING, LI JUNHONG, YAN JUNYAO, CHENG FENGLING, NING YONGDUO, ZHONG GENGHANG, ZHAO ERJING, LU JINJUN, WANG HAITAO
Year of Publication 04.05.2021
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Year of Publication 04.05.2021
Patent
Preparation method of silicon substrate polished wafer for IGBT
BIAN YONGZHI, XU JIPING, LI JUNHONG, YAN JUNYAO, CUI BIN, LI YINGTAO, ZHANG JIANHUA, CHENG FENGLING, NING YONGDUO, ZHONG GENGHANG, LIAN QINGWEI
Year of Publication 30.04.2021
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Year of Publication 30.04.2021
Patent
Gas dispersion device used in a growth process of wafer polycrystalline silicon film and growth process
LIU BIN, BIAN YONGZHI, XU JIPING, NING YONGDUO, SUN HONGBO, LI YAODONG, WANG HAITAO, LU JINJUN
Year of Publication 24.06.2015
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Year of Publication 24.06.2015
Patent
Acid corrosion processing method of large-diameter substrate wafer suitable for single-side polishing
BIAN YONGZHI, ZHANG LIANG, XU JIPING, LU LIYAN, CHENG FENGLING, ZHENG YU, NING YONGDUO, ZHONG GENGHANG
Year of Publication 09.06.2020
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Year of Publication 09.06.2020
Patent
Device and method for removing surface damage of wafer by alkali corrosion
BIAN YONGZHI, LIU ZUOXING, XU JIPING, LU LIYAN, CHENG FENGLING, NING YONGDUO, ZHONG GENGHANG, CHEN HE
Year of Publication 09.06.2020
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Year of Publication 09.06.2020
Patent
Device and method for evaluating compactness of silicon-based back sealing film
LIU BIN, ZHANG LIANG, XU JIPING, SHI XUNDA, LIU HAOYI, NING YONGDUO, QU XIANG, LU JINJUN
Year of Publication 25.06.2019
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Year of Publication 25.06.2019
Patent