CARRIER RING TO PEDESTAL KINEMATIC MOUNT FOR SUBSTRATE PROCESSING TOOLS
MADSEN ERIC, NIMMALA SESHU, LINEBARGER NICK RAY JR, BRUENING RIGEL MARTIN
Year of Publication 03.11.2023
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Year of Publication 03.11.2023
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기판 프로세싱 툴을 위한 페데스탈 키네마틱 마운트 (pedestal kinematic mount) 로의 캐리어 링 (carrier ring)
MADSEN ERIC, NIMMALA SESHU, LINEBARGER NICK RAY JR, BRUENING RIGEL MARTIN
Year of Publication 30.06.2022
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Year of Publication 30.06.2022
Patent
열 확산기를 갖는 고온 기판 지지부
CHANDRASEKHARAN RAMESH, NIMMALA SESHU, BELOSTOTSKIY SERGEY GEORGIYEVICH, GAGE CHRISTOPHER, LINGAMPALLI RAMKISHAN RAO, LEESER KARL FREDERICK, HOLLINGSWORTH JOEL, LAFFERTY WILLIAM, BURKHART VINCENT
Year of Publication 21.10.2022
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Year of Publication 21.10.2022
Patent
CARRIER RING TO PEDESTAL KINEMATIC MOUNT FOR SUBSTRATE PROCESSING TOOLS
MADSEN, Eric, NIMMALA, Seshu, LINEBARGER, Jr., Nick Ray, BRUENING, Rigel Martin
Year of Publication 29.12.2022
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Year of Publication 29.12.2022
Patent
HIGH TEMPERATURE SUBSTRATE SUPPORT WITH HEAT SPREADER
CHANDRASEKHARAN, Ramesh, GAGE, Christopher, LAFFERTY, William, NIMMALA, Seshu, BELOSTOTSKIY, Sergey Georgiyevich, BURKHART, Vincent, HOLLINGSWORTH, Joel, LEESER, Karl Frederick, LINGAMPALLI, Ramkishan Rao
Year of Publication 09.03.2023
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Year of Publication 09.03.2023
Patent
HIGH TEMPERATURE SUBSTRATE SUPPORT WITH HEAT SPREADER
CHANDRASEKHARAN, Ramesh, GAGE, Christopher, LAFFERTY, William, NIMMALA, Seshu, BELOSTOTSKIY, Sergey Georgiyevich, BURKHART, Vincent, HOLLINGSWORTH, Joel, LEESER, Karl Frederick, LINGAMPALLI, Ramkishan Rao
Year of Publication 26.08.2021
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Year of Publication 26.08.2021
Patent
Kinematic mounting of carrier ring to base for substrate processing tool
ERIC MADSEN, NICK RAY LINEBARGER JR, NIMMALA, SESHU, BRUENING, RIEGEL, MARTIN
Year of Publication 12.07.2022
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Year of Publication 12.07.2022
Patent
High temperature substrate support with heat spreader
GAGE, CHRISTOPHER, LINGAMPALLI, RAMKISHAN RAO, HOLLINGSWORTH, JOEL, CHANDRASEKHARAN, RAMESH, LAFFERTY, WILLIAM, BELOSTOTSKIY, SERGEY GEORGIYEVICH, LEESER, KARL FREDERICK, NIMMALA, SESHU, BURKHART, VINCENT
Year of Publication 01.12.2021
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Year of Publication 01.12.2021
Patent