High-Temperature Oxidation of Aluminum-Ion-Implanted Titanium Nitride Films
MITSUO, Atsushi, UCHIDA, Satoshi, NIHIRA, Nobuhiro, YAMADA, Hitoshi, KANO, Shigeru, IWAKI, Masaya
Published in Hyōmen gijutsu (01.03.1998)
Published in Hyōmen gijutsu (01.03.1998)
Get full text
Journal Article