Bossung curves and focus stigmation matrices for Gaussian beam lithography
Raghunathan, Ananthan, Hartley, John G., Crosland, Nigel
Published in Microelectronic engineering (01.08.2011)
Published in Microelectronic engineering (01.08.2011)
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Journal Article
Conference Proceeding
PATTERN WRITING ON A ROTATING SUBSTRATE
MCCLELLAND ANDREW WILLIAM, HOYLE PHILIP CLIFFORD, CROSLAND NIGEL CHARLES EDWARD, KING DAVID MARTIN PLATTON, LAIDLER IAN, WILLIAMS JASON GERAINT SEABORNE
Year of Publication 21.10.2010
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Year of Publication 21.10.2010
Patent
Dual-mode electron beam lithography machine
CROSLAND NIGEL, KRISTOFF JEFFREY, GROVES TIMOTHY, RAFFERTY BRIAN, ADAM KLAUS-DIETER, SCHUBERT GERHARD
Year of Publication 30.05.2006
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Year of Publication 30.05.2006
Patent
Dual-mode electron beam lithography machine
Crosland, Nigel, Adam, Klaus-Dieter, Groves, Timothy, Kristoff, Jeffrey, Rafferty, Brian, Schubert, Gerhard
Year of Publication 30.05.2006
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Year of Publication 30.05.2006
Patent
Dual-mode electron beam lithography machine
BRIAN RAFFERTY, NIGEL CROSLAND, GERHARD SCHUBERT, JEFFREY KROSTOFF, TIMOTHY GROVES, KLAUS-DIETER ADAM
Year of Publication 14.12.2005
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Year of Publication 14.12.2005
Patent
DUAL-MODE ELECTRON BEAM LITHOGRAPHY MACHINE
CROSLAND NIGEL, KRISTOFF JEFFREY, GROVES TIMOTHY, RAFFERTY BRIAN, ADAM KLAUS-DIETER, SCHUBERT GERHARD
Year of Publication 03.03.2005
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Year of Publication 03.03.2005
Patent