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"NI QILIANG"
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Method for detecting abnormity of mechanical arm of detector
by
CHEN HONGLIN
,
NI QILIANG
,
ZHU LUJUN
,
LONG YIN
Year of Publication
03.09.2014
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Position synchronizing method of defect detection and observation devices
by
CHEN HONGLIN
,
NI QILIANG
,
LONG YIN
Year of Publication
03.09.2014
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Correction method for self-aligned process window of dark field defect detection equipment
by
YUAN ZENGYI
,
CHEN HONGLIN
,
NI QILIANG
,
ZHU LUJUN
,
LONG YIN
Year of Publication
07.09.2016
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Method for verifying sensitivity of defect detection program
by
CHEN HONGLIN
,
NI QILIANG
,
LONG YIN
Year of Publication
02.07.2014
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Method for testing polycrystalline silicon bottom bridging defect through capacitor contrast test structure
by
FAN RONGWEI
,
CHEN HONGLIN
,
NI QILIANG
,
LONG YIN
Year of Publication
02.07.2014
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Method for detecting defect of insufficient etching on polysilicon bottom by ion puncture
by
FAN RONGWEI
,
CHEN HONGLIN
,
NI QILIANG
,
LONG YIN
Year of Publication
25.06.2014
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Defect detecting method for adjusting detection frequency
by
CHEN HONGLIN
,
NI QILIANG
,
LONG YIN
Year of Publication
25.06.2014
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Method and device for detecting failed production machine platforms
by
WANG ZHOUNAN
,
CHEN HONGLIN
,
NI QILIANG
,
LONG YIN
Year of Publication
28.05.2014
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Method of observing corrosion conditions of metals in chemical mechanical polishing process
by
FAN RONGWEI
,
CHEN HONGLIN
,
NI QILIANG
,
LONG YIN
Year of Publication
26.03.2014
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A method for improving a wafer peeling defect
by
FAN RONGWEI
,
CHEN HONGLIN
,
NI QILIANG
,
LONG YIN
Year of Publication
19.03.2014
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Wafer defect detection method
by
CHEN HONGLIN
,
NI QILIANG
,
LONG YIN
Year of Publication
19.03.2014
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Method for detecting defects of wafer with the use of electron beam
by
CHEN HONGLIN
,
NI QILIANG
,
LONG YIN
Year of Publication
19.03.2014
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Method for detecting metal-wire corrosion by production environment
by
CHEN HONGLIN
,
NI QILIANG
,
WANG KAI
,
LONG YIN
Year of Publication
19.03.2014
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A wafer defect detecting method
by
FAN RONGWEI
,
CHEN HONGLIN
,
NI QILIANG
,
LONG YIN
Year of Publication
19.03.2014
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Method for monitoring sensitivity of electron beam defect scanning tool
by
FAN RONGWEI
,
CHEN HONGLIN
,
NI QILIANG
,
LONG YIN
Year of Publication
19.03.2014
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Defect?inspection?method?of?automatic?noise?reduction
by
CHEN HONGLIN
,
NI QILIANG
,
LONG YIN
Year of Publication
19.03.2014
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A method for reducing errors in the observation of wafers by an electron microscope
by
CHEN HONGLIN
,
NI QILIANG
,
WANG KAI
,
LONG YIN
Year of Publication
19.03.2014
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A wafer working method for monitoring defect conditions of multi-cavity devices
by
CHEN HONGLIN
,
NI QILIANG
,
WANG KAI
,
LONG YIN
Year of Publication
19.03.2014
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Method and device for improving defect classification accuracy
by
CHEN HONGLIN
,
NI QILIANG
,
LONG YIN
Year of Publication
26.02.2014
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Elevator malfunction alerting pacifies device
by
WU KANGJIE
,
NI QILIANG
,
WU LUYUE
Year of Publication
06.04.2016
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