Slit adjusting device capable of adjusting slit width in double directions
YUAN WENQUAN, WANG XUELIANG, GONG YAN, ZHAO LEI, ZHANG WEI, NI MINGYANG
Year of Publication 28.12.2011
Get full text
Year of Publication 28.12.2011
Patent
Thousands-of-unit extensible adaptive optical system wave-front processor
ZHAO JINYU, WANG JIANLI, WANG MINGHAO, CAO JINGTAI, JIA JIANLU, NI MINGYANG
Year of Publication 19.10.2011
Get full text
Year of Publication 19.10.2011
Patent
Axial jog adjustment device for optical element in projection objective system
YUAN WENQUAN, WANG XUELIANG, GONG YAN, ZHAO LEI, ZHANG WEI, NI MINGYANG
Year of Publication 17.08.2011
Get full text
Year of Publication 17.08.2011
Patent
Compensating device of gravity deformation of optical element
YUAN WENQUAN, WANG XUELIANG, GONG YAN, ZHAO LEI, ZHANG WEI, NI MINGYANG
Year of Publication 13.04.2011
Get full text
Year of Publication 13.04.2011
Patent
Slit adjusting device capable of adjusting slit width in double directions
YUAN WENQUAN, WANG XUELIANG, GONG YAN, ZHAO LEI, ZHANG WEI, NI MINGYANG
Year of Publication 15.12.2010
Get full text
Year of Publication 15.12.2010
Patent
Integrating sphere device for optical measurement
YUAN WENQUAN, WANG XUELIANG, GONG YAN, ZHAO LEI, ZHANG WEI, NI MINGYANG
Year of Publication 15.12.2010
Get full text
Year of Publication 15.12.2010
Patent
Optical element gravity deformation draught head compensating device in projection objective system and method thereof
YUAN WENQUAN, WANG XUELIANG, GONG YAN, ZHAO LEI, ZHANG WEI, NI MINGYANG
Year of Publication 08.12.2010
Get full text
Year of Publication 08.12.2010
Patent
Axial jog adjustment device for optical element in projection objective system
YUAN WENQUAN, WANG XUELIANG, GONG YAN, ZHAO LEI, ZHANG WEI, NI MINGYANG
Year of Publication 01.12.2010
Get full text
Year of Publication 01.12.2010
Patent