Locking device for movable mechanism in photoetching projection object lens
SUN ZHEN, ZHAO LEI, YANG HUAIJIANG, SUI YONGXIN, NI MINGYANG, LI XIANLING
Year of Publication 24.12.2014
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Year of Publication 24.12.2014
Patent
Supporting device with self-weight compensation function for lens in photoetching projection objective
SUN ZHEN, ZHANG DEFU, YANG HUAIJIANG, SUI YONGXIN, LI XIANLING, NI MINGYANG
Year of Publication 17.12.2014
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Year of Publication 17.12.2014
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Dual-motor optical element axial adjustment device
PENG HAIFENG, SUN ZHEN, HUA YANGYANG, GUO KANG, GONG YAN, NI MINGYANG
Year of Publication 25.12.2013
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Year of Publication 25.12.2013
Patent
Plane diaphragm device
CHEN HUANAN, SUN ZHEN, GUO KANG, YANG HUAIJIANG, SUI YONGXIN, LI XIANLING, NI MINGYANG
Year of Publication 12.11.2014
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Year of Publication 12.11.2014
Patent
Planar flexible micro-moving adjustment device for optical elements
GUO KANG, ZHANG DEFU, ZHAO LEI, ZHANG WEI, YANG HUAIJIANG, SUI YONGXIN, LI XIANLING, NI MINGYANG
Year of Publication 17.09.2014
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Year of Publication 17.09.2014
Patent
Supporting device of lens in photoetching projection objective
YUAN WENQUAN, WANG XUELIANG, GONG YAN, ZHAO LEI, ZHANG WEI, NI MINGYANG
Year of Publication 17.04.2013
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Year of Publication 17.04.2013
Patent
Device for assembling and regulating lens of projection objective of lithography machine
YUAN WENQUAN, WANG XUELIANG, GONG YAN, ZHAO LEI, ZHANG WEI, NI MINGYANG
Year of Publication 17.04.2013
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Year of Publication 17.04.2013
Patent
Multi-airbag support device for optical element in lithographic projection lens system
CHEN HUANAN, PENG HAIFENG, GONG YAN, HE XIN, LI XIANLING, NI MINGYANG
Year of Publication 20.11.2013
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Year of Publication 20.11.2013
Patent
Integrating sphere device for optical measurement
YUAN WENQUAN, WANG XUELIANG, GONG YAN, ZHAO LEI, ZHANG WEI, NI MINGYANG
Year of Publication 11.04.2012
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Year of Publication 11.04.2012
Patent