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리프트 핀 홀더

리프트 핀 홀더

by NGUYEN KHIEM K
Year of Publication 03.06.2020

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Patent

ETCH PROCESSING SYSTEM HAVING REFLECTIVE ENDPOINT DETECTION

ETCH PROCESSING SYSTEM HAVING REFLECTIVE ENDPOINT DETECTION

by GRIMBERGEN MICHAEL N, NGUYEN KHIEM K
Year of Publication 13.12.2021

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Patent

반사성 종료점 검출을 하는 에칭 처리 시스템

반사성 종료점 검출을 하는 에칭 처리 시스템

by GRIMBERGEN MICHAEL N, NGUYEN KHIEM K
Year of Publication 16.10.2019

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Patent

Etch processing system having reflective endpoint detection

Etch processing system having reflective endpoint detection

by Grimbergen, Michael N, Nguyen, Khiem K
Year of Publication 11.06.2024

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Patent

Lift pin holder

Lift pin holder

by Nguyen, Khiem K
Year of Publication 14.01.2020

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Patent

LIFT PIN HOLDER

LIFT PIN HOLDER

by NGUYEN, Khiem K
Year of Publication 02.05.2019

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Patent

LIFT PIN HOLDER

LIFT PIN HOLDER

by Nguyen, Khiem K
Year of Publication 02.05.2019

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Patent

ETCH PROCESSING SYSTEM HAVING REFLECTIVE ENDPOINT DETECTION

ETCH PROCESSING SYSTEM HAVING REFLECTIVE ENDPOINT DETECTION

by Grimbergen, Michael N, Nguyen, Khiem K
Year of Publication 26.08.2021

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Patent

Etch processing system having reflective endpoint detection

Etch processing system having reflective endpoint detection

by Grimbergen, Michael N, Nguyen, Khiem K
Year of Publication 01.06.2021

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Patent

Lift pin holder, and assembly and process chamber including the same

Lift pin holder, and assembly and process chamber including the same

by NGUYEN, KHIEM K
Year of Publication 01.12.2022

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Patent

LIFT PIN HOLDER

LIFT PIN HOLDER

by NGUYEN KHIEM K
Year of Publication 12.06.2020

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Patent

Lift pin holder

Lift pin holder

by NGUYEN, KHIEM K
Year of Publication 16.05.2020

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Patent

ETCH PROCESSING SYSTEM HAVING REFLECTIVE ENDPOINT DETECTION

ETCH PROCESSING SYSTEM HAVING REFLECTIVE ENDPOINT DETECTION

by GRIMBERGEN, Michael N, NGUYEN, Khiem K
Year of Publication 13.09.2018

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Patent

Etch processing system having reflective endpoint detection

Etch processing system having reflective endpoint detection

by GRIMBERGEN, MICHAEL N, NGUYEN, KHIEM K
Year of Publication 21.01.2021

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Patent

Plasma reactor having an array of plural individually controlled gas injectors arranged along a circular side wall

Plasma reactor having an array of plural individually controlled gas injectors arranged along a circular side wall

by Panayil, Sheeba J, Lewington, Richard, Chandrachood, Madhavi R, Grimbergen, Michael N, Nguyen, Khiem K, Kumar, Ajay, Ibrahim, Ibrahim M
Year of Publication 01.01.2019

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Patent

Etch processing system having reflective endpoint detection

Etch processing system having reflective endpoint detection

by GRIMBERGEN, MICHAEL N, NGUYEN, KHIEM K
Year of Publication 16.12.2018

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Patent

VERFAHREN UND VORRICHTUNG ZUR MESSTECHNIKINTEGRATION MIT EINER ÄTZBEHANDLUNG

VERFAHREN UND VORRICHTUNG ZUR MESSTECHNIKINTEGRATION MIT EINER ÄTZBEHANDLUNG

by LEWINGTON, RICHARD, NGUYEN, KHIEM K
Year of Publication 15.01.2010

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Patent

Method and apparatus for integrating metrology with etch processing

Method and apparatus for integrating metrology with etch processing

by LEWINGTON, RICHARD, NGUYEN, KHIEM K
Year of Publication 13.01.2010

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Patent

Method and apparatus for integrating metrology with etch processing

Method and apparatus for integrating metrology with etch processing

by Nguyen, Khiem K, Lewington, Richard
Year of Publication 13.10.2009

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Patent

Method and apparatus for integrating metrology with etch processing

Method and apparatus for integrating metrology with etch processing

by LEWINGTON RICHARD, NGUYEN KHIEM K
Year of Publication 13.10.2009

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Patent