Search Results - "NEYA HISATOSHI" :: K.UTB vyhledávací portál

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LITHOGRAPHY APPARATUS METHOD OF CONTROLLING LITHOGRAPHY APPARATUS ARTICLE MANUFACTURING METHOD AND PROGRAM

by NEYA HISATOSHI, KAYAMORI SHOTA, DOI SATORU
Year of Publication 20.03.2024

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FORMING METHOD SYSTEM LITHOGRAPHY APPARATUS ARTICLE MANUFACTURING METHOD AND PROGRAM

by ZHANG QU, KIJIMA WATARU, HOMMA HIDEAKI, NEYA HISATOSHI
Year of Publication 26.04.2024

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TRANSPORT APPARATUS EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE

by NAKAJIMA DAISUKE, USUI KATSUTOSHI, NEYA HISATOSHI, KANEDA TAKASHI, SENDA TAKAHIRO
Year of Publication 14.06.2021

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MARK DETECTING APPARATUS MARK LEARNING APPARATUS SUBSTRATE PROCESSING APPARATUS MARK DETECTING METHOD AND MANUFACTURING METHOD OF ARTICLE

by HIOKI MASANORI, YONEDA SHINGO, SUZUKI TOHRU, KUROSAWA YOSHIAKI, YAMAMOTO MASASHI, NEYA HISATOSHI
Year of Publication 22.11.2022

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INFORMATION PROCESSING APPARATUS INFORMATION PROCESSING METHOD AND ARTICLE MANUFACTURING METHOD

by HIOKI MASANORI, YONEDA SHINGO, SUZUKI TOHRU, KUROSAWA YOSHIAKI, NEYA HISATOSHI, YAMAMOTO MASASHI
Year of Publication 11.08.2022

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FORMING METHOD SYSTEM LITHOGRAPHY APPARATUS ARTICLE MANUFACTURING METHOD AND PROGRAM

by ZHANG QU, KIJIMA WATARU, HOMMA HIDEAKI, NEYA HISATOSHI
Year of Publication 16.06.2020

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DETERMINATION METHOD EXPOSURE METHOD EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE

by ZHANG QU, KIJIMA WATARU, HOMMA HIDEAKI, TAKIGUCHI ATSUSHI, NEYA HISATOSHI
Year of Publication 26.06.2020

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Lithography apparatus, method of controlling lithography apparatus, article manufacturing method, and storage medium

by DOI MASARU, NEYA HISATOSHI, KAYAMORI SHOTA
Year of Publication 15.03.2024

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MARK DETECTING APPARATUS, MARK LEARNING APPARATUS, SUBSTRATE PROCESSING APPARATUS, MARK DETECTING METHOD, AND MANUFACTURING METHOD OF ARTICLE

by Kurosawa, Yoshiaki, Suzuki, Tohru, Yamamoto, Masashi, Yoneda, Shingo, Hioki, Masanori, Neya, Hisatoshi
Year of Publication 17.11.2022

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TWI801685B

by HOMMA, HIDEAKI, KIJIMA, WATARU, ZHANG, QU, NEYA, HISATOSHI
Year of Publication 11.05.2023

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TWI803710B

by HOMMA, HIDEAKI, KIJIMA, WATARU, ZHANG, QU, TAKIGUCHI, ATSUSHI, NEYA, HISATOSHI
Year of Publication 01.06.2023

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Transport apparatus, exposure apparatus, and article manufacturing method

by NAKAJIMA DAISUKE, USUI KATSUTOSHI, NEYA HISATOSHI, KANEDA TAKASHI, SENDA TAKAHIRO
Year of Publication 04.06.2021

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Information processing apparatus, information processing method, and method for manufacturing article

by YONEDA, SHINGO, KUROSAWA, YOSHIAKI, YAMAMOTO, MASASHI, SUZUKI, TOHRU, NEYA, HISATOSHI, HIOKI, MASANORI
Year of Publication 16.01.2023

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Mark detecting apparatus, mark learning apparatus, substrate processing apparatus, mark detecting method, and manufacturing method of article

by KUROSAWA, YOSHIAKI, YONEDA, SHINGO, YAMAMOTO, MASASHI, SUZUKI, TOHRU, NEYA, HISATOSHI, HIOKI, MASANORI
Year of Publication 16.11.2022

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Mark detection apparatus, mark learning apparatus, and substrate processing apparatus

by HIOKI MASANORI, YONEDA SHINGO, KUROSAWA YOSHIAKI, YAMAMOTO MASASHI, SUZUKI TORU, NEYA HISATOSHI
Year of Publication 15.11.2022

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INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND METHOD FOR MANUFACTURING ARTICLE

by HIOKI MASANORI, YONEDA SHINGO, KUROSAWA YOSHIAKI, NEYA HISATOSHI, SUZUKI TORU, YAMAMOTO MASASHI
Year of Publication 05.08.2022

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Forming method, system, lithography device, manufacturing method of article, and program

by HOMMA, HIDEAKI, KIJIMA, WATARU, ZHANG, QU, NEYA, HISATOSHI
Year of Publication 01.10.2020

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Determination method, exposure method, exposure apparatus, and method of manufacturing article both ensuring overlay accuracy of the upper and lower layers and joint accuracy of the adjacent irradiation regions in an optical lithography process

by HOMMA, HIDEAKI, KIJIMA, WATARU, ZHANG, QU, TAKIGUCHI, ATSUSHI, NEYA, HISATOSHI
Year of Publication 01.07.2020

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DETERMINATION METHOD, EXPOSURE METHOD, EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE

by ZHANG QU, KIJIMA WATARU, HOMMA HIDEAKI, TAKIGUCHI ATSUSHI, NEYA HISATOSHI
Year of Publication 26.06.2020

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