TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEAT TRANSFER FLUID FLOW
MERRY WALTER R, ZHOU XIAOPING, MAHADESWARASWAMY CHETAN, SILVEIRA FERNANDO M, MAYS BRAD L, PATTAR YASHASWINI B, TSONG TINA, NEVIL SHANE C, TAVASSOLI HAMID, BUCHBERGER DOUGLAS A, NGUYEN DUY D
Year of Publication 24.07.2013
Get full text
Year of Publication 24.07.2013
Patent
Feedforward temperature control for plasma processing apparatus
Mahadeswaraswamy, Chetan, Shoji, Sergio Fukuda, Nguyen, Duy D, Buchberger, Jr., Douglas A, Zhang, Chunlei, Nevil, Shane C, Tsong, Tina, Merry, Walter R, Silveira, Fernando M, Pattar, Yashaswini, Noorbakhsh, Hamid, Ramaswamy, Kartik, Mays, Brad L
Year of Publication 01.12.2020
Get full text
Year of Publication 01.12.2020
Patent
Temperature management of aluminium nitride electrostatic chuck
BANDA SUMANTH, NEVIL SHANE C, BUCHBERGER, JR. DOUGLAS A, SUN JENNIFER Y
Year of Publication 07.06.2016
Get full text
Year of Publication 07.06.2016
Patent
Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity
ZHOU XIAOPING, NEVIL SHANE C, TAVASSOLI HAMID, BUCHBERGER, JR. DOUGLAS A, KUMAR SURAJIT, BERA KALLOL
Year of Publication 02.02.2016
Get full text
Year of Publication 02.02.2016
Patent
TEMPERATURE MANAGEMENT OF ALUMINIUM NITRIDE ELECTROSTATIC CHUCK
BANDA SUMANTH, NEVIL SHANE C, BUCHBERGER, JR. DOUGLAS A, SUN JENNIFER Y
Year of Publication 24.07.2014
Get full text
Year of Publication 24.07.2014
Patent
TEMPERATURE MANAGEMENT OF ALUMINIUM NITRIDE ELECTROSTATIC CHUCK
BANDA, SUMANTH, SUN, JENNIFER Y, NEVIL, SHANE C, BUCHBERGER, DOUGLAS, JR
Year of Publication 24.07.2014
Get full text
Year of Publication 24.07.2014
Patent
Assembly for delivering RF power and DC voltage to a plasma processing chamber
NEVIL SHANE C, TAVASSOLI HAMID, BUCHBERGER, JR. DOUGLAS A, KUMAR SURAJIT
Year of Publication 14.01.2014
Get full text
Year of Publication 14.01.2014
Patent
MULTI-ZONED PLASMA PROCESSING ELECTROSTATIC CHUCK WITH IMPROVED TEMPERATURE UNIFORMITY
ZHOU XIAOPING, NEVIL SHANE C, TAVASSOLI HAMID, BUCHBERGER, JR. DOUGLAS A, KUMAR SURAJIT, BERA KALLOL
Year of Publication 27.11.2014
Get full text
Year of Publication 27.11.2014
Patent
Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity
ZHOU XIAOPING, NEVIL SHANE C, TAVASSOLI HAMID, BUCHBERGER, JR. DOUGLAS A, KUMAR SURAJIT, BERA KALLOL
Year of Publication 02.09.2014
Get full text
Year of Publication 02.09.2014
Patent
FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS
MERRY WALTER R, MAHADESWARASWAMY CHETAN, MAYS BRAD L, SHOJI SERGIO FUKUDA, TSONG TINA, NEVIL SHANE C, BUCHBERGER, JR. DOUGLAS A, RAMASWAMY KARTIK, PATTAR YASHASWINI, NGUYEN DUY D, ZHANG CHUNLEI, SILVEIRA FERNANDO M, NOORBAKHSH HAMID
Year of Publication 02.06.2016
Get full text
Year of Publication 02.06.2016
Patent
Feedforward temperature control for plasma processing apparatus
MERRY WALTER R, MAHADESWARASWAMY CHETAN, MAYS BRAD L, SHOJI SERGIO FUKUDA, TSONG TINA, NEVIL SHANE C, BUCHBERGER, JR. DOUGLAS A, RAMASWAMY KARTIK, NGUYEN DUY D, ZHANG CHUNLEI, PATTAR YASHASWINI B, SILVEIRA FERNANDO M, NOORBAKHSH HAMID
Year of Publication 10.05.2016
Get full text
Year of Publication 10.05.2016
Patent
TWO-PHASE OPERATION OF PLASMA CHAMBER BY PHASE LOCKED LOOP
KOBAYASHI, SATORU, LIU, JONATHAN, WONG, LAWRENCE, RAUF, SHAHID, NEVIL, SHANE, C, BERA, KALLOL, YANG, YANG, RAMASWAMY, KARTIK, COLLINS, KENNETH, S
Year of Publication 31.10.2013
Get full text
Year of Publication 31.10.2013
Patent
TWO-PHASE OPERATION OF PLASMA CHAMBER BY PHASE LOCKED LOOP
LIU JONATHAN, KOBAYASHI SATORU, WONG LAWRENCE, NEVIL SHANE C, YANG YANG, RAMASWAMY KARTIK, RAUF SHAHID, COLLINS KENNETH S, BERA KALLOL
Year of Publication 31.10.2013
Get full text
Year of Publication 31.10.2013
Patent
Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow
MERRY WALTER R, ZHOU XIAOPING, MAHADESWARASWAMY CHETAN, SILVEIRA FERNANDO M, MAYS BRAD L, PATTAR YASHASWINI B, TSONG TINA, NEVIL SHANE C, TAVASSOLI HAMID, BUCHBERGER DOUGLAS A, NGUYEN DUY D
Year of Publication 15.12.2015
Get full text
Year of Publication 15.12.2015
Patent
TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEAT TRANSFER FLUID FLOW
MERRY WALTER R, ZHOU XIAOPING, MAHADESWARASWAMY CHETAN, SILVEIRA FERNANDO M, MAYS BRAD L, PATTAR YASHASWINI B, TSONG TINA, NEVIL SHANE C, TAVASSOLI HAMID, BUCHBERGER DOUGLAS A, NGUYEN DUY D
Year of Publication 05.11.2015
Get full text
Year of Publication 05.11.2015
Patent
ASSEMBLY FOR DELIVERING RF POWER AND DC VOLTAGE TO A PLASMA PROCESSING CHAMBER
NEVIL SHANE C, TAVASSOLI HAMID, BUCHBERGER, JR. DOUGLAS A, KUMAR SURAJIT
Year of Publication 08.12.2011
Get full text
Year of Publication 08.12.2011
Patent
PLASMA PROCESSING USING RF RETURN PATH VARIABLE IMPEDANCE CONTROLLER WITH TWO-DIMENSIONAL TUNING SPACE
WONG, LAWRENCE, RAUF, SHAHID, CARDUCCI, JAMES, D, NEVIL, SHANE, C, YANG, YANG, BUCHBERGER, DOUGLAS, A, MISRA, NIPUN, RAMASWAMY, KARTIK, COLLINS, KENNETH, S
Year of Publication 31.10.2013
Get full text
Year of Publication 31.10.2013
Patent
PLASMA PROCESSING USING RF RETURN PATH VARIABLE IMPEDANCE CONTROLLER WITH TWO-DIMENSIONAL TUNING SPACE
WONG LAWRENCE, NEVIL SHANE C, YANG YANG, CARDUCCI JAMES D, RAMASWAMY KARTIK, BUCHBERGER, JR. DOUGLAS A, RAUF SHAHID, COLLINS KENNETH S, MISRA NIPUN
Year of Publication 24.10.2013
Get full text
Year of Publication 24.10.2013
Patent
Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow
MERRY WALTER R, ZHOU XIAOPING, MAHADESWARASWAMY CHETAN, SILVEIRA FERNANDO M, MAYS BRAD L, PATTAR YASHASWINI B, TSONG TINA, NEVIL SHANE C, TAVASSOLI HAMID, BUCHBERGER DOUGLAS A, NGUYEN DUY D
Year of Publication 23.12.2014
Get full text
Year of Publication 23.12.2014
Patent
MULTI-ZONED PLASMA PROCESSING ELECTROSTATIC CHUCK WITH IMPROVED TEMPERATURE UNIFORMITY
ZHOU XIAOPING, NEVIL SHANE C, TAVASSOLI HAMID, BUCHBERGER, JR. DOUGLAS A, KUMAR SURAJIT, BERA KALLOL
Year of Publication 19.04.2012
Get full text
Year of Publication 19.04.2012
Patent