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Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component
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Year of Publication 08.11.2018
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Year of Publication 26.09.2018
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MICROMECHANICAL YAW RATE SENSOR AND METHOD FOR OPERATING SAME
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Year of Publication 26.09.2018
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Year of Publication 26.09.2018
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Yaw-rate sensor with a substrate having a main plane of extent, production method for a yaw-rate sensor
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Year of Publication 21.06.2023
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Year of Publication 14.03.2019
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Year of Publication 14.03.2019
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