THREE AXIS MICROMECHANICAL ROTATIONAL RATE SENSOR ARRANGEMENT WITH LINEARLY AND ROTATIONALLY DRIVABLE SENSOR DEVICES
NEUL, Reinhard, KUHLMANN, Burkhard, BODE, Niels, KUEHNEL, Matthias, LASSL, Andreas, PRUETZ, Odd-Axel, KUHLMANN, Nils Felix, DEGENFELD-SCHONBURG, Peter, LIEWALD, Jan-Timo
Year of Publication 01.06.2022
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Year of Publication 01.06.2022
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YAW-RATE SENSOR WITH A SUBSTRATE HAVING A MAIN EXTENSION PLANE, METHOD FOR MANUFACTURING A YAW-RATE SENSOR
Liewald, Jan-Timo, Kuhlmann, Burkhard, Neul, Reinhard, Kuhlmann, Nils Felix, Lassl, Andreas, Kuehnel, Matthias, Bode, Niels, Degenfeld-Schonburg, Peter
Year of Publication 10.06.2021
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Year of Publication 10.06.2021
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System Level Modeling of the Relevant Physical Effects of Inertial Sensors Using Order Reduction Methods
Reitz, Sven, Döring, Christian, Bastian, Jens, Schneider, Peter, Schwarz, Peter, Neul, Reinhard
Published in Analog integrated circuits and signal processing (01.08.2005)
Published in Analog integrated circuits and signal processing (01.08.2005)
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Journal Article
Three-axis micromechanical rotation rate sensor system including linearly and rotatorily drivable sensor units
Lassi, Andreas, Liewald, Jan-Timo, Kuhlmann, Burkhard, Neul, Reinhard, Kuhlmann, Nils Felix, Kuehnel, Matthias, Bode, Niels, Pruetz, Odd-Axel, Degenfeld-Schonburg, Peter
Year of Publication 18.01.2022
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Year of Publication 18.01.2022
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Micromechanical yaw rate sensor and method for the production thereof
Ohms, Torsten, Neul, Reinhard, Schmidt, Benjamin, Maul, Robert, Hattass, Mirko, Scheben, Rolf, Hoeppner, Christian, Heuck, Friedjof, Pruetz, Odd-Axel
Year of Publication 25.08.2020
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Year of Publication 25.08.2020
Patent
Micromechanical yaw rate sensor and method for operating same
Ohms, Torsten, Neul, Reinhard, Schmidt, Benjamin, Maul, Robert, Hattass, Mirko, Scheben, Rolf, Hoeppner, Christian, Heuck, Friedjof, Pruetz, Odd-Axel
Year of Publication 25.08.2020
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Year of Publication 25.08.2020
Patent
Micromechanical rotational rate sensor system and corresponding production method
Lassi, Andreas, Liewald, Jan-Timo, Kuhlmann, Burkhard, Neul, Reinhard, Kuhlmann, Nils Felix, Kuehnel, Matthias, Bode, Niels, Pruetz, Odd-Axel, Degenfeld-Schonburg, Peter
Year of Publication 26.01.2021
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Year of Publication 26.01.2021
Patent
THREE-AXIS MICROMECHANICAL ROTATION RATE SENSOR SYSTEM INCLUDING LINEARLY AND ROTATORILY DRIVABLE SENSOR UNITS
Liewald, Jan-Timo, Kuhlmann, Burkhard, Neul, Reinhard, Kuhlmann, Nils Felix, Lassl, Andreas, Kuehnel, Matthias, Bode, Niels, Pruetz, Odd-Axel, Degenfeld-Schonburg, Peter
Year of Publication 12.11.2020
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Year of Publication 12.11.2020
Patent
MICROMECHANICAL YAW RATE SENSOR AND METHOD FOR OPERATING SAME
NEUL, Reinhard, HEUCK, Friedjof, PRUETZ, Odd-Axel, HOEPPNER, Christian, OHMS, Torsten, HATTASS, Mirko, SCHEBEN, Rolf, MAUL, Robert, SCHMIDT, Benjamin
Year of Publication 18.09.2019
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Year of Publication 18.09.2019
Patent
MICROMECHANICAL YAW RATE SENSOR AND METHOD FOR THE PRODUCTION THEREOF
NEUL, Reinhard, HEUCK, Friedjof, PRUETZ, Odd-Axel, HOEPPNER, Christian, OHMS, Torsten, HATTASS, Mirko, SCHEBEN, Rolf, MAUL, Robert, SCHMIDT, Benjamin
Year of Publication 18.09.2019
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Year of Publication 18.09.2019
Patent