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"NEUKIRCH ULRICH W.H"
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"NEUKIRCH ULRICH W.H"
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Deuteroxyl-doped silica glass, optical member and lithographic system comprising same and method of making same
by
FIACCO RICHARD M
,
BOOKBINDER DANA C
,
NEUKIRCH ULRICH W.H
Year of Publication
10.05.2007
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Synthetic silica having low polarization-induced birefringence, method of making same and lithographic device comprising same
by
SMITH CHARLENE M
,
BOOKBINDER DANA C
,
ALAN DOUGLAS C
,
NEUKIRCH ULRICH W.H
Year of Publication
29.06.2006
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Synthetic silica material with low fluence-dependent-transmission and method of making the same
by
HRDINA KENNETH E
,
KOHNKE GLENN E
,
MOORE LISA A
,
SCHIEFELBEIN SUSAN L
,
SMITH CHARLENE M
,
BOOKBINDER DANA C
,
NEUKIRCH ULRICH W.H
Year of Publication
04.01.2007
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Format
Patent
3 results
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Subject Area
chemistry
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medicine
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sciences
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Topic
chemical composition of glasses, glazes, or vitreousenamels
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chemistry
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glass
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joining glass to glass or other materials
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manufacture, shaping, or supplementary processes
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metallurgy
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Language
English
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esp@cenet
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