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Year of Publication 03.01.2012
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Year of Publication 08.12.2011
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POSITIVE-WORKING PHOTOIMAGEABLE BOTTOM ANTIREFLECTIVE COATING
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Year of Publication 08.08.2012
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Positive-Working Photoimageable Bottom Antireflective Coating
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Year of Publication 31.03.2011
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SPIN ON ORGANIC ANTIREFLECTIVE COATING COMPOSITION COMPRISING POLYMER WITH FUSED AROMATIC RINGS
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Year of Publication 16.12.2010
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Solvent mixtures for antireflective coating compositions for photoresists
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Year of Publication 02.11.2010
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Solvent mixtures for antireflective coating compositions for photoresists
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Year of Publication 02.11.2010
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Year of Publication 02.11.2010
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Process of imaging a photoresist with multiple antireflective coatings
Abdallah, David J, Neisser, Mark O, Dammel, Ralph R, Pawlowski, Georg, Biafore, John, Romano, Andrew R
Year of Publication 19.10.2010
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Year of Publication 19.10.2010
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Process of imaging a photoresist with multiple antireflective coatings
DAMMEL RALPH R, ROMANO ANDREW R, ABDALLAH DAVID J, PAWLOWSKI GEORG, BIAFORE JOHN, NEISSER MARK O
Year of Publication 19.10.2010
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Year of Publication 19.10.2010
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ANTIREFLECTIVE COMPOSITIONS FOR PHOTORESISTS
GONZALEZ, ELEAZAR, OBERLANDER, JOSEPH, E, DING-LEE, SHUJI, XIANG, ZHONG, SHAN, JIANHUI, WU, HENGPENG, NEISSER, MARK, O
Year of Publication 11.01.2012
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Year of Publication 11.01.2012
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BOTTOM ANTIREFLECTIVE COATING COMPOSITIONS
DIOSES, ALBERTO, D, OBERLANDER, JOSEPH, E, MIYAZAKI, SHINJI, HOULIHAN, FRANCIS, M, NEISSER, MARK, O
Year of Publication 04.08.2010
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Year of Publication 04.08.2010
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POSITIVE-WORKING PHOTOIMAGEABLE BOTTOM ANTIREFLECTIVE COATING
MEDHAT A. TOUKHY, TOMOHIDE KATAYAMA, HENGPENG WU, MARK O. NEISSER, ARITAKA HISHIDA, YU SUI, SHUJI S. DING-LEE, JOSEPH E. OBERLANDER, WENBING KANG
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Year of Publication 15.01.2013
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A PROCESS OF IMAGING A PHOTORESIST WITH MULTIPLE ANTIREFLECTIVE COATINGS
JOHN BIAFORE, ANDREW R. ROMANO, WOOKYU KIM, DAVID J. ABDALLAH, MARK O. NEISSER, GEORG PAWLOWSKI, RALPH R. DAMMEL
Year of Publication 29.07.2011
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Year of Publication 29.07.2011
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POSITIVE-WORKING PHOTOIMAGEABLE BOTTOM ANTIREFLECTIVE COATING
OBERLANDER, JOSEPH, E, TOUKHY, MEDHAT, A, WU, HENGPENG, KANG, WENBING, KATAYAMA, TOMOHIDE, SUI, YU, NEISSER, MARK, O, DING-LEE, SHUJI, S, HISHIDA, ARITAKA
Year of Publication 27.09.2012
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Year of Publication 27.09.2012
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