Plasma enhanced in situ chamber cleaning evaluated by extracted-plasma-parameter analysis
Ino, K., Natori, I., Ichikawa, A., Vrtis, R.N., Ohmi, T.
Published in IEEE transactions on semiconductor manufacturing (01.05.1996)
Published in IEEE transactions on semiconductor manufacturing (01.05.1996)
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Journal Article
Hydrocarbon polymers containing six-membered rings in the main chain. Microstructure and properties of poly(1,3-cyclohexadiene)
Natori, Itaru, Imaizumi, Kimio, Yamagishi, Hideyuki, Kazunori, Miyuki
Published in Journal of polymer science. Part B, Polymer physics (30.07.1998)
Published in Journal of polymer science. Part B, Polymer physics (30.07.1998)
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Journal Article
Microphase-separated structure of 1,3-cyclohexadiene/butadiene triblock copolymers and its effect on mechanical and thermal properties
Imaizumi, Kimio, Ono, Takashi, Natori, Itaru, Sakurai, Shinichi, Takeda, Kunihiko
Published in Journal of polymer science. Part B, Polymer physics (01.01.2001)
Published in Journal of polymer science. Part B, Polymer physics (01.01.2001)
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Journal Article
Minimizing damage and contamination in RIE processes by extracted-plasma-parameter analysis
Yamashita, T., Hasaka, S., Natori, I., Fukui, H., Ohmi, T.
Published in IEEE transactions on semiconductor manufacturing (01.08.1992)
Published in IEEE transactions on semiconductor manufacturing (01.08.1992)
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Journal Article
Hole-doping effect on magnetic properties of La1-xSrxCoO3 (0≤x≤0.5)
ITOH, M, NATORI, I, KUBOTA, S, MOTOYA, K
Published in Journal of magnetism and magnetic materials (1995)
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Published in Journal of magnetism and magnetic materials (1995)
Conference Proceeding
In situ chamber cleaning using halogenated-gas plasmas evaluated by plasma-parameter extraction
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Conference Proceeding
Journal Article