SINGLE CRYSTAL METAL OXIDE PLASMA CHAMBER COMPONENT
DETERT, Douglas, KERNS, John Michael, KOSHY, Robin, WETZEL, David Joseph, SRINIVASAN, Satish, ANDERSON, Nash W, LIU, Lei, XU, Lin, PAPE, Eric A, HAZARIKA, Pankaj, DAUGHERTY, John
Year of Publication 08.12.2022
Get full text
Year of Publication 08.12.2022
Patent
Single crystal metal oxide plasma chamber component
ANDERSON, NASH W, KOSHY, ROBIN, HAZARIKA, PANKAJ, PAPE, ERIC A, WETZEL, DAVID JOSEPH, KERNS, JOHN MICHAEL, XU, LIN, LIU, LEI, DETERT, DOUGLAS, DAUGHERTY, JOHN, SRINIVASAN, SATISH
Year of Publication 01.09.2021
Get full text
Year of Publication 01.09.2021
Patent
Plasma-resistant atomic layer deposition coatings to extend the lifetime of polymer components
STEVENSON THOMAS R, KERNS JOHN MICHAEL, XU LIN, ANDERSON NASH W, DAUGHERTY JOHN
Year of Publication 04.01.2017
Get full text
Year of Publication 04.01.2017
Patent