Method for calibrating a two-wavelength pyrometer, method for determining the temperature of a semiconducting wafer and a system for determining the temperature of a semiconducting wafer
Kaspari, Christian, Zettler, Joerg-Thomas, Cornwell, David William, Nash, James Henry, Haberland, Kolja Lutz
Year of Publication 16.09.2020
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Year of Publication 16.09.2020
Patent
Method for calibrating a two-wavelength pyrometer, method for determining the temperature of a semiconducting wafer and a system for determining the temperature of a semiconducting wafer
HABERLAND, KOLJA LUTZ, CORNWELL, DAVID WILLIAM, NASH, JAMES HENRY, KASPARI, CHRISTIAN, ZETTLER, JOERG-THOMAS
Year of Publication 24.06.2015
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Year of Publication 24.06.2015
Patent