TRANSFER MACHINE FOR SUBSTRATE TRANSFER AND SUBSTRATE TRANSFER METHOD
KOBAYASHI KENICHI, NANJO TAKAHIRO, TAKENAKA HIROYUKI, TANIZAWA AKIHIRO
Year of Publication 26.09.2019
Get full text
Year of Publication 26.09.2019
Patent
TRANSFER MACHINE FOR SUBSTRATE TRANSFER AND SUBSTRATE TRANSFER METHOD
KOBAYASHI KENICHI, NANJO TAKAHIRO, TAKENAKA HIROYUKI, TANIZAWA AKIHIRO
Year of Publication 22.06.2017
Get full text
Year of Publication 22.06.2017
Patent
기판 반송 장치 및 기판 반송 장치를 구비하는 기판 처리 장치
KOBAYASHI KENICHI, KOBA TAKASHI, MITSUYA TAKASHI, DU FONG JIE, NANJO TAKAHIRO, YAZAWA AKIHIRO, KASHIWAGI MAKOTO, AKAZAWA KENICHI, TOGAWA TETSUJI, AOYAMA HIDEHARU, MATSUGU ASAGI
Year of Publication 23.03.2021
Get full text
Year of Publication 23.03.2021
Patent
SUBSTRATE-CONVEYING DEVICE, AND SUBSTRATE-PROCESSING DEVICE COMPRISING SUBSTRATE-CONVEYING DEVICE
KASHIWAGI, Makoto, NANJO, Takahiro, AKAZAWA, Kenichi, AOYAMA, Hideharu, KOBA, Takashi, MATSUGU, Asagi, DU, Fong-Jie, TOGAWA, Tetsuji, YAZAWA, Akihiro, MITSUYA, Takashi, KOBAYASHI, Kenichi
Year of Publication 16.01.2020
Get full text
Year of Publication 16.01.2020
Patent
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE PROCESSING APPARATUS INCLUDING SUBSTRATE TRANSFER DEVICE
KOBAYASHI KENICHI, KOBA TAKASHI, MITSUYA TAKASHI, NANJO TAKAHIRO, DU FENG JIE, KASHIWAGI MAKOTO, AKAZAWA KENICHI, TOGAWA TETSUJI, TANIZAWA AKIHIRO, MATSUGI ASAO, AOYAMA HIDEHARU
Year of Publication 16.01.2020
Get full text
Year of Publication 16.01.2020
Patent
Substrate transfer apparatus and substrate transfer method
Nanjo, Takahiro, Takenaka, Hiroyuki, Yazawa, Akihiro, Kobayashi, Kenichi
Year of Publication 16.07.2019
Get full text
Year of Publication 16.07.2019
Patent
SUBSTRATE-CONVEYING DEVICE, AND SUBSTRATE-PROCESSING DEVICE COMPRISING SUBSTRATE-CONVEYING DEVICE
KASHIWAGI, Makoto, NANJO, Takahiro, AKAZAWA, Kenichi, AOYAMA, Hideharu, KOBA, Takashi, MATSUGU, Asagi, DU, Fong-Jie, TOGAWA, Tetsuji, YAZAWA, Akihiro, MITSUYA, Takashi, KOBAYASHI, Kenichi
Year of Publication 23.03.2022
Get full text
Year of Publication 23.03.2022
Patent
SUBSTRATE TRANSPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING SUBSTRATE TRANSPORTER
Du, Fong-Jie, Matsugu, Asagi, Nanjo, Takahiro, Togawa, Tetsuji, Yazawa, Akihiro, Akazawa, Kenichi, Kobayashi, Kenichi, Kashiwagi, Makoto, Koba, Takashi, Aoyama, Hideharu, Mitsuya, Takashi
Year of Publication 06.01.2022
Get full text
Year of Publication 06.01.2022
Patent
SUBSTRATE-CONVEYING DEVICE, AND SUBSTRATE-PROCESSING DEVICE COMPRISING SUBSTRATE-CONVEYING DEVICE
KASHIWAGI, Makoto, NANJO, Takahiro, AKAZAWA, Kenichi, AOYAMA, Hideharu, KOBA, Takashi, MATSUGU, Asagi, DU, Fong-Jie, TOGAWA, Tetsuji, YAZAWA, Akihiro, MITSUYA, Takashi, KOBAYASHI, Kenichi
Year of Publication 19.05.2021
Get full text
Year of Publication 19.05.2021
Patent