METHOD FOR FORMING CONDUCTIVE CONTACT BODY OF INTEGRATED CIRCUIT ELEMENT USING DUMMY INSULATING LAYER
CHU CHANG-WOONG, KIM DONG-HYUN, LEE SANG HYEOP, KIN CHISHU, KIM HYOUNG-JOON, NAN HEIIN, BOKU KEIEN, OH YONGUL
Year of Publication 31.01.2002
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Year of Publication 31.01.2002
Patent