Resistivity of Thin Copper Interconnection Layers
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Published in Japanese Journal of Applied Physics (01.01.2005)
Published in Japanese Journal of Applied Physics (01.01.2005)
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Year of Publication 13.03.2024
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Year of Publication 07.03.2024
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Year of Publication 20.08.2020
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Year of Publication 09.07.2020
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Year of Publication 07.07.2020
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Year of Publication 04.06.2020
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HONDA KAZUYA, YAMAMOTO SHINYA, KOBAYASHI HIROYUKI, SAKAKIBARA KENGO, NAMIKI KEN
Year of Publication 17.10.2019
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Year of Publication 17.10.2019
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HONDA KAZUYA, YAMAMOTO SHINYA, KOBAYASHI HIROYUKI, NAMIKI KEN, SAKAKIBARA KENGO
Year of Publication 17.10.2019
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Year of Publication 17.10.2019
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