Gas injector and film deposition apparatus having the same
NAM GOONG SUNG TAE, LEE CHANG JAE, KWON YOUNG HO, LEE KYOO HWAN, LEE HYUNG SUP
Year of Publication 14.01.2014
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Year of Publication 14.01.2014
Patent
GAS INJECTOR AND FILM DEPOSITION APPARATUS HAVING THE SAME
NAM GOONG SUNG TAE, LEE CHANG JAE, KWON YOUNG HO, LEE KYOO HWAN, LEE HYUNG SUP
Year of Publication 02.07.2009
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Year of Publication 02.07.2009
Patent
Gas injector and film deposition apparatus having the sam
NAM GOONG SUNG TAE, LEE CHANG JAE, KWON YOUNG HO, LEE KYOO HWAN, LEE HYUNG SUP
Year of Publication 12.06.2013
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Year of Publication 12.06.2013
Patent
Gas injector and film deposition apparatus having the same
NAM GOONG SUNG TAE, LEE CHANG JAE, KWON YOUNG HO, LEE KYOO HWAN, LEE HYUNG SUP
Year of Publication 27.03.2013
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Year of Publication 27.03.2013
Patent
Gas injector and film deposition apparatus having the same
NAM GOONG SUNG TAE, LEE CHANG JAE, KWON YOUNG HO, LEE KYOO HWAN, LEE HYUNG SUP
Year of Publication 15.07.2009
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Year of Publication 15.07.2009
Patent