Scanning electron microscope line-profile analysis of less-than-10-nm patterns
Hatano, Michio, Nakayama, Yoshinori, Hotta, Shoji, Momonoi, Yoshinori, Wang, Zhigang
Published in Japanese Journal of Applied Physics (01.06.2017)
Published in Japanese Journal of Applied Physics (01.06.2017)
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Method for Fabricating Multilevel Interconnection Structures Using Differential Delamination Energies between Metal and Silicon Oxide Thin Films
AONO, TAKANORI, IWASAKI, TOMIO, YOSHIMURA, YASUHIRO, NAKAYAMA, YOSHINORI
Published in Electronics and communications in Japan (01.04.2016)
Published in Electronics and communications in Japan (01.04.2016)
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Laboratory Experiment of Plasma Flow Around Magnetic Sail
Funaki, Ikkoh, Kojima, Hidenori, Yamakawa, Hiroshi, Nakayama, Yoshinori, Shimizu, Yukio
Published in Astrophysics and space science (01.01.2007)
Published in Astrophysics and space science (01.01.2007)
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25 nm pitch comparison between a traceable x-ray diffractometer and a metrological atomic force microscope
Misumi, Ichiko, Kitta, Jun-ichiro, Fujimoto, Hiroyuki, Gonda, Satoshi, Azuma, Yasushi, Maeda, Keisuke, Kurosawa, Tomizo, Ito, Yoshiyasu, Omote, Kazuhiko, Nakayama, Yoshinori, Kawada, Hiroki
Published in Measurement science & technology (01.01.2012)
Published in Measurement science & technology (01.01.2012)
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Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope
Misumi, Ichiko, Gonda, Satoshi, Kurosawa, Tomizo, Tanimura, Yoshihisa, Ochiai, Naofumi, Kitta, Jun-ichiro, Kubota, Fumio, Yamada, Mitsuhiko, Fujiwara, Yoshinobu, Nakayama, Yoshinori, Takamasu, Kiyoshi
Published in Measurement science & technology (01.12.2003)
Published in Measurement science & technology (01.12.2003)
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Research and Development of an Ion Engine Grid Design Tool
FUNAKI, Ikkoh, KAJIMURA, Yoshihiro, NAKANO, Masakatsu, SHINOHARA, Iku, HYAKUTAKE, Toru, MIYASAKA, Takeshi, NAKAYAMA, Yoshinori, KUNINAKA, Hitoshi
Published in Theoretical and Applied Mechanics Japan (01.01.2011)
Published in Theoretical and Applied Mechanics Japan (01.01.2011)
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Current status of space gravitational wave antenna DECIGO and B-DECIGO
Kawamura, Seiji, Ando, Masaki, Seto, Naoki, Sato, Shuichi, Musha, Mitsuru, Kawano, Isao, Yokoyama, Jun’ichi, Tanaka, Takahiro, Ioka, Kunihito, Akutsu, Tomotada, Takashima, Takeshi, Agatsuma, Kazuhiro, Araya, Akito, Aritomi, Naoki, Asada, Hideki, Chiba, Takeshi, Eguchi, Satoshi, Enoki, Motohiro, Fujimoto, Masa-Katsu, Fujita, Ryuichi, Futamase, Toshifumi, Harada, Tomohiro, Hayama, Kazuhiro, Himemoto, Yoshiaki, Hiramatsu, Takashi, Hong, Feng-Lei, Hosokawa, Mizuhiko, Ichiki, Kiyotomo, Ikari, Satoshi, Ishihara, Hideki, Ishikawa, Tomohiro, Itoh, Yousuke, Ito, Takahiro, Iwaguchi, Shoki, Izumi, Kiwamu, Kanda, Nobuyuki, Kanemura, Shinya, Kawazoe, Fumiko, Kobayashi, Shiho, Kohri, Kazunori, Kojima, Yasufumi, Kokeyama, Keiko, Kotake, Kei, Kuroyanagi, Sachiko, Maeda, Kei-ichi, Matsushita, Shuhei, Michimura, Yuta, Morimoto, Taigen, Mukohyama, Shinji, Nagano, Koji, Nagano, Shigeo, Naito, Takeo, Nakamura, Kouji, Nakamura, Takashi, Nakano, Hiroyuki, Nakao, Kenichi, Nakasuka, Shinichi, Nakayama, Yoshinori, Nakazawa, Kazuhiro, Nishizawa, Atsushi, Ohkawa, Masashi, Oohara, Kenichi, Sago, Norichika, Saijo, Motoyuki, Sakagami, Masaaki, Sakai, Shin-ichiro, Sato, Takashi, Shibata, Masaru, Shinkai, Hisaaki, Shoda, Ayaka, Somiya, Kentaro, Sotani, Hajime, Takahashi, Ryutaro, Takahashi, Hirotaka, Akiteru, Takamori, Taniguchi, Keisuke, Taruya, Atsushi, Tsubono, Kimio, Tsujikawa, Shinji, Ueda, Akitoshi, Ueda, Ken-ichi, Watanabe, Izumi, Yagi, Kent, Yamada, Rika, Yokoyama, Shuichiro, Yoo, Chul-Moon, Zhu, Zong-Hong
Published in Progress of theoretical and experimental physics (01.05.2021)
Published in Progress of theoretical and experimental physics (01.05.2021)
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