Feasibility Study of Multiple-Beam Scanning Electron Microscopy for Defect Inspection
Nakasuji, Mamoru, Yoshikawa, Shoji, Satake, Tohru, Noji, Nobuharu
Published in Japanese Journal of Applied Physics (01.07.2005)
Published in Japanese Journal of Applied Physics (01.07.2005)
Get full text
Journal Article
Brightness as a function of lens excitation
Nakasuji, Mamoru, Goto, Katsuto, Hirano, Yutaka
Published in Japanese Journal of Applied Physics (01.10.2020)
Published in Japanese Journal of Applied Physics (01.10.2020)
Get full text
Journal Article
Spherical and chromatic aberration correction using aperture lens : computer simulation
NAKASUJI, M, SHIMIZU, H
Published in JPN J APPL PHYS PART 1 REGUL PAP SHORT NOTE REV PAP (01.03.1993)
Published in JPN J APPL PHYS PART 1 REGUL PAP SHORT NOTE REV PAP (01.03.1993)
Get full text
Journal Article
Residual Aberrations and Beam Trajectories of Electron Beam Reducing Image Projection System with Dynamically Compensated Field Aberrations
Mamoru Nakasuji, Mamoru Nakasuji, Hiroyasu Shimizu, Hiroyasu Shimizu
Published in Japanese Journal of Applied Physics (01.02.1994)
Published in Japanese Journal of Applied Physics (01.02.1994)
Get full text
Journal Article