High manufacturability Cu multilevel interconnects featuring hybrid-NCS structure
Sugiura, I., Misawa, N., Otsuka, S., Nishikawa, N., Iba, Y., Sugimoto, F., Setta, Y., Sakai, H., Koura, Y., Nakano, K., Karasawa, T., Ohkura, Y., Kouno, T., Watatani, H., Nakata, Y., Mizushima, Y., Suzuki, T., Kitada, H., Shimizu, N., Nakai, S., Nakaishi, M., Fukuyama, S., Nakamura, T., Yano, E., Miyajima, M., Watanabe, K.
Published in Microelectronic engineering (01.12.2005)
Published in Microelectronic engineering (01.12.2005)
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Conference Proceeding
Effect of Aging on Trunk Muscle Function and Its Influence on Falls Among Older Adults
Porto, Jaqueline M, Spilla, Sállua B, Cangussu-Oliveira, Luciana M, Freire Júnior, Renato C, Nakaishi, Ana Paula M, de Abreu, Daniela C C
Published in Journal of aging and physical activity (01.10.2020)
Published in Journal of aging and physical activity (01.10.2020)
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Journal Article
A highly robust SiGe source drain technology realized by disposable sidewall spacer (DSW) for 65nm node and beyond
Kim, Y.S., Mori, T., Hayami, Y., Yamamoto, T., Morioka, H., Kokura, H., Kawamura, K., Shimamune, Y., Katakami, A., Hatada, A., Shima, M., Tamura, N., Ohta, H., Sakuma, T., Kojima, M., Nakaishi, M., Sugii, T., Miyajima, M.
Published in Proceedings of 35th European Solid-State Device Research Conference, 2005. ESSDERC 2005 (2005)
Published in Proceedings of 35th European Solid-State Device Research Conference, 2005. ESSDERC 2005 (2005)
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Conference Proceeding
Improvements of stress controllability and radiation resistance by adding carbon to boron-nitride
YAMADA, M, NAKAISHI, M, SUGISHIMA, K
Published in Journal of the Electrochemical Society (01.07.1990)
Published in Journal of the Electrochemical Society (01.07.1990)
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Journal Article
Effects of X-ray mask structures and processes on X-ray mask distortion
Kondo, K., Yamada, M., Nakaishi, M., Kudo, J., Sugishima, K.
Published in Microelectronic engineering (1990)
Published in Microelectronic engineering (1990)
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Conference Proceeding
Effects of an Electron-Withdrawing Group on Thermal Decomposition of 4-Alkylidene-1-pyrazolines: A Novel Stereoselective Formation of Alkylidenecyclopropane Due to Participation of π-Electrons on the Methylene Carbon in Decomposition
Hamaguchi, Masashi, Nakaishi, Masahiro, Nagai, Toshikazu, Tamura, Hatsue
Published in Journal of organic chemistry (12.12.2003)
Published in Journal of organic chemistry (12.12.2003)
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An X-ray mask using Ta and heteroepitaxially grown SiC
Yamada, M., Nakaishi, M., Kudou, J., Eshita, T., Furumura, Y.
Published in Microelectronic engineering (1989)
Published in Microelectronic engineering (1989)
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A 100 nm CMOS technology with "sidewall-notched" 40 nm transistors and SiC-capped Cu/VLK interconnects for high performance microprocessor applications
Nakai, S., Takao, Y., Otsuka, S., Sugiyama, K., Ohta, H., Yamanoue, A., Iriyama, Y., Nanjyo, R., Sekino, S., Nagai, H., Naitoh, K., Nakamura, R., Sambonsugi, Y., Tagawa, Y., Horiguchi, N., Yamamoto, T., Kojima, M., Satoh, S., Sugatani, S., Sugii, T., Kase, M., Suzuki, K., Nakaishi, M., Miyajima, M., Ohba, T., Hanyu, I., Yanai, K.
Published in 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) (2002)
Published in 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) (2002)
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Conference Proceeding
0.65 V device design with high-performance and high-density 100 nm CMOS technology for low operation power application
Takao, Y., Nakai, S., Tagawa, Y., Otsuka, S., Sambonsugi, Y., Sugiyama, K., Oota, H., Iriyama, Y., Nanjyo, R., Nagai, H., Naitoh, K., Nakamura, R., Sekino, S., Yamanoue, A., Horiguchi, N., Yamamoto, T., Kojima, M., Satoh, S., Sugii, T., Kase, M., Suzuki, K., Nakaishi, M., Miyajima, M., Ohba, T., Hanyu, I., Sugatani, S.
Published in 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) (2002)
Published in 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) (2002)
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Conference Proceeding
Novel composite resonance DC-DC converter with voltage doubler rectifier
Kato, H., Matsuo, H., Eguchi, M., Sakamoto, Y., Nakaishi, M.
Published in INTELEC 2009 - 31st International Telecommunications Energy Conference (01.10.2009)
Published in INTELEC 2009 - 31st International Telecommunications Energy Conference (01.10.2009)
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Conference Proceeding
High-Performance Low Operation Power Transistor for 45nm Node Universal Applications
Sugii, T., Hashimoto, K., Miyajima, M., Sato, S., Kojima, M., Nakai, S., Fukuyama, S., Nakaishi, M., Sukegawa, K., Aoyama, T., Tamura, N., Fukutome, H., Miyashita, T., Sakuma, T., Ota, H., Katakami, A., Shimamune, Y., Hatada, A., Minakata, H., Hayami, Y., Mori, T., Okoshi, K., Isome, T., Watanabe, T., Morioka, H., Kokura, H., Ogura, J., Sugimoto, K., Owada, T., Okuno, M., Pidin, S., Kawamura, K., Sakoda, T., Yamaguchi, A., Okabe, K., Shima, M.
Published in 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers (2006)
Published in 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers (2006)
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Conference Proceeding
Process technologies for Ta/SiC X-ray masks
YAMADA, M, KONDO, K, NAKAISHI, M, KUDO, J, SUGISHIMA, K
Published in Journal of the Electrochemical Society (01.07.1990)
Published in Journal of the Electrochemical Society (01.07.1990)
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Journal Article
Stress Stabilization of Tantalum Absorbers on X-Ray Masks
Kondo, K, Nakaishi, M, Yamada, M, Yamabe, M, Sugishmia, K
Published in Microelectronic engineering (21.09.1992)
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Published in Microelectronic engineering (21.09.1992)
Journal Article
An etching mechanism of Ta by chlorine-based plasmas
YAMADA, M, NAKAISHI, M, SUGISHIMA, K
Published in Journal of the Electrochemical Society (01.02.1991)
Published in Journal of the Electrochemical Society (01.02.1991)
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