SEMICONDUCTOR TESTING DEVICE AND METHOD FOR SEPARATING SEMICONDUCTOR ELEMENT
EBIIKE YUJI, ITO YOSHINORI, TOKU SACHIHIRO, NAKAHARA TAKEHIKO, SAKAI TADAYUKI
Year of Publication 06.06.2019
Get full text
Year of Publication 06.06.2019
Patent
An in-process X-ray measuring system with a heat-resistant filter transmitting soft X-rays for light elements
NAKAHARA, T, KOSHINAKA, M, BADONO, S, TOMODA, T
Published in Japanese Journal of Applied Physics (01.03.1991)
Published in Japanese Journal of Applied Physics (01.03.1991)
Get full text
Journal Article
A new fast QC method for testing contact hole roughness by defect review SEM image analysis
Takeda, H., Sawai, K., Uesugi, K., Nakahara, T., Mihara, T., Nagaishi, H., Sakurai, K.
Published in 2007 International Symposium on Semiconductor Manufacturing (01.10.2007)
Published in 2007 International Symposium on Semiconductor Manufacturing (01.10.2007)
Get full text
Conference Proceeding
SOLID ELECTROLYTIC CAPACITOR AND PRODUCTION METHOD THEREOF, AND CONDUCTIVE POLYMER POLYMERIZING OXIDIZING AGENT SOLUTION
YOSHINO, TSUYOSHI, SAITO, KAZUYO, NAKAHARA, TAKEHIKO, MORI, YOSHIYUKI, YAMASHITA, ICHIRO, WATANABE, YOSHIHIRO, MASUMI, HIDEKI, MURATA, YUKI, NITTA, YUKIHIRO, MOROKUMA, MUNEHIRO
Year of Publication 22.03.2001
Get full text
Year of Publication 22.03.2001
Patent
Reduction of particle generation in capacitively coupled plasma etching reactor
Horikoshi, K., Hayamizu, T., Hirano, M., Sasaki, K., Nagano, M., Mitani, M., Inoue, Y., Katayama, K., Nakahara, T., Shioya, M., Sato, Y.
Published in 2007 International Symposium on Semiconductor Manufacturing (01.10.2007)
Published in 2007 International Symposium on Semiconductor Manufacturing (01.10.2007)
Get full text
Conference Proceeding
Semiconductor device having dual-STI and manufacturing method thereof
Mitsuhira, Noriyuki, Nakahara, Takehiko, Suzuki, Yasusuke, Sumino, Jun
Year of Publication 23.10.2012
Get full text
Year of Publication 23.10.2012
Patent
Semiconductor device having dual-STI and manufacturing method thereof
Mitsuhira, Noriyuki, Nakahara, Takehiko, Suzuki, Yasusuke, Sumino, Jun
Year of Publication 28.12.2010
Get full text
Year of Publication 28.12.2010
Patent
OPTICAL DEVICE AND MANUFACTURING METHOD THEREOF
KODERA HIDEKAZU, NAKAHARA TAKEHIKO, FUKUDA KEIICHI, ARIGA HIROSHI, UTO KENICHI, YASUI NOBUYUKI, SHIMONO MASAYA, MOCHIZUKI KEITA, MURAO SATOSHI
Year of Publication 14.11.2013
Get full text
Year of Publication 14.11.2013
Patent
OPTICAL APPARATUS AND METHOD OF MANUFACTURING THE SAME
KODERA HIDEKAZU, NAKAHARA TAKEHIKO, FUKUDA KEIICHI, UTO KENICHI, YASUI NOBUYUKI, SHIMONO MASAYA, ARUGA HIROSHI, MOCHIZUKI KEITA, MURAO TADASHI
Year of Publication 03.10.2013
Get full text
Year of Publication 03.10.2013
Patent
SEMICONDUCTOR DEVICE AND ITS PRODUCTION PROCESS
NAKAHARA TAKEHIKO, MIYATA MOTOMU, SATANI KAZUHIKO, KOGA TAKUYA, HONMA TAKURO
Year of Publication 27.08.2009
Get full text
Year of Publication 27.08.2009
Patent