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Published in Phosphorus, sulfur, and silicon and the related elements (22.06.2022)
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Year of Publication 14.01.2021
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레지스트 하층막 형성용 조성물, 레지스트 하층막 및 그의 형성 방법, 패터닝된 기판의 제조 방법 그리고 화합물
MATSUMURA YUUSHI, NAKAFUJI SHIN YA, ABE TSUBASA, WAKAMATSU GOJI, SAKAI KAZUNORI, NOSAKA NAOYA, TAKIMOTO YOSHIO
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Year of Publication 24.06.2019
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COMPOSITION FOR FORMING RESIST UNDERLAYER FILM, RESIST UNDERLAYER FILM, FORMATION METHOD FOR RESIST UNDERLAYER FILM, PRODUCTION METHOD FOR PATTERNED SUBSTRATE, AND COMPOUND
NOSAKA Naoya, SAKAI Kazunori, MATSUMURA Yuushi, TAKIMOTO Yoshio, WAKAMATSU Goji, NAKAFUJI Shin-ya, ABE Tsubasa
Year of Publication 26.04.2018
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Year of Publication 26.04.2018
Patent