Efficient Monte Carlo simulation of ion implantation into 3D FinFET structure
Kubotera, Hiroyuki, Kayama, Yasuyuki, Nagura, Sachio, Usami, Yasutsugu, Schmidt, Alexander, Kwon, Uihui, Keun-Ho Lee, Park, Youngkwan
Published in 2014 20th International Conference on Ion Implantation Technology (IIT) (01.06.2014)
Published in 2014 20th International Conference on Ion Implantation Technology (IIT) (01.06.2014)
Get full text
Conference Proceeding