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"NAGASEKI, KAZUYA"
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SUBSTRATE PROCESSING APPARATUS
by
NAGASEKI
,
Kazuya
,
AMIKURA, Norihiko
Year of Publication
15.08.2024
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ETCHING APPARATUS AND ETCHING METHOD
by
NAGASEKI KAZUYA
,
NAGAMI KOICHI
Year of Publication
09.04.2024
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PLASMA PROCESSING APPARATUS
by
TAMAMUSHI GEN
,
NAGASEKI KAZUYA
Year of Publication
19.03.2024
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TRAY
by
MOYAMA KAZUKI
,
NAGASEKI KAZUYA
Year of Publication
17.11.2023
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PLASMA PROCESSING SYSTEM AND PLASMA PROCESSING METHOD
by
MOYAMA KAZUKI
,
NAGASEKI KAZUYA
Year of Publication
09.01.2023
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SUBSTRATE SUPPORT BASE, PLASMA TREATMENT SYSTEM, AND EDGE RING PLACEMENT METHOD
by
MOYAMA KAZUKI
,
NAGASEKI KAZUYA
Year of Publication
21.10.2021
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PART TRANSPORTING DEVICE
by
MOYAMA KAZUKI
,
NAGASEKI KAZUYA
,
MATSUDA TOSHIYA
Year of Publication
10.06.2024
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TRANSFER METHOD IN SUBSTRATE PROCESSING SYSTEM
by
MOYAMA KAZUKI
,
NAGASEKI KAZUYA
Year of Publication
01.03.2021
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CONVEYANCE METHOD IN SUBSTRATE PROCESSING SYSTEM
by
MOYAMA KAZUKI
,
NAGASEKI KAZUYA
Year of Publication
23.02.2021
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PROCESSING DEVICE AND PROCESSING SYSTEM
by
MOYAMA KAZUKI
,
NAGASEKI KAZUYA
,
MATSUDA TOSHIYA
Year of Publication
04.03.2024
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PART REPLACEMENT SYSTEM
by
MOYAMA KAZUKI
,
NAGASEKI KAZUYA
,
MATSUDA TOSHIYA
Year of Publication
14.02.2024
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SUBSTRATE PROCESSING METHOD
by
MOYAMA KAZUKI
,
NAGASEKI KAZUYA
Year of Publication
26.11.2020
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ELECTROSTATIC CHUCK FORMING METHOD AND PLASMA PROCESSING DEVICE
by
KANEKO SHOTA
,
NAGASEKI KAZUYA
,
SAITO MICHISHIGE
Year of Publication
18.10.2023
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ETCHING METHOD AND PLASMA PROCESSING APPARATUS
by
TAMAMUSHI GEN
,
NAGASEKI KAZUYA
Year of Publication
21.05.2020
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ETCHING METHOD AND PLASMA PROCESSING APPARATUS
by
TAMAMUSHI GEN
,
NAGASEKI KAZUYA
Year of Publication
13.05.2020
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PLASMA PROCESSING APPARATUS AND COMPONENTS FOR PLASMA PROCESSING APPARATUS
by
KANEKO SHOTA
,
NAGASEKI KAZUYA
,
SAITO MICHISHIGE
Year of Publication
21.04.2023
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FORMING METHOD OF COMPONENT AND PLASMA PROCESSING APPARATUS
by
KANEKO SHOTA
,
NAGASEKI KAZUYA
,
SAITO MICHISHIGE
Year of Publication
06.04.2023
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ETCHING APPARATUS AND ETCHING METHOD
by
NAGASEKI KAZUYA
,
NAGAMI KOICHI
Year of Publication
06.11.2019
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ETCHING DEVICE AND ETCHING METHOD
by
NAGAUMI KOICHI
,
NAGASEKI KAZUYA
Year of Publication
31.10.2019
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PLASMA PROCESSING APPARATUS
by
OHATA MITSUNORI
,
HIMORI SHINJI
,
NAGASEKI KAZUYA
Year of Publication
11.01.2023
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