Search Results - "NAGAMI Koichi" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

ETCHING APPARATUS AND ETCHING METHOD

ETCHING APPARATUS AND ETCHING METHOD

by NAGASEKI KAZUYA, NAGAMI KOICHI
Year of Publication 09.04.2024

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Patent

PLASMA PROCESSING APPARATUS AND ETCHING METHOD

PLASMA PROCESSING APPARATUS AND ETCHING METHOD

by TORII NATSUMI, NAGAMI KOICHI
Year of Publication 24.02.2023

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Patent

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

by OHSHITA TATSURO, NAGAMI KOICHI
Year of Publication 12.05.2022

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Patent

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

by TORII NATSUMI, NAGAMI KOICHI
Year of Publication 25.01.2022

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Patent

PLASMA PROCESSING METHOD

PLASMA PROCESSING METHOD

by NAGAMI KOICHI
Year of Publication 10.10.2017

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Patent

PLASMA PROCESSING METHOD

PLASMA PROCESSING METHOD

by NAGAMI KOICHI
Year of Publication 10.10.2017

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Patent

PLASMA PROCESSING DEVICE, AND METHOD FOR CONTROLLING SOURCE FREQUENCY OF SOURCE HIGH-FREQUENCY ELECTRIC POWER

PLASMA PROCESSING DEVICE, AND METHOD FOR CONTROLLING SOURCE FREQUENCY OF SOURCE HIGH-FREQUENCY ELECTRIC POWER

by KIKUCHI Yuto, YAZAKI Yuma, NAGAMI Koichi
Year of Publication 01.02.2024

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Patent

PLASMA PROCESSING METHOD

PLASMA PROCESSING METHOD

by NAGAMI KOICHI
Year of Publication 27.07.2017

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Patent

METHOD FOR CONTROLLING POTENTIAL OF SUSCEPTOR OF PLASMA PROCESSING APPARATUS

METHOD FOR CONTROLLING POTENTIAL OF SUSCEPTOR OF PLASMA PROCESSING APPARATUS

by NAGAMI KOICHI
Year of Publication 24.08.2016

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Patent

ETCHING APPARATUS AND ETCHING METHOD

ETCHING APPARATUS AND ETCHING METHOD

by NAGASEKI KAZUYA, NAGAMI KOICHI
Year of Publication 06.11.2019

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Patent

PLASMA PROCESSING APPARATUS AND POWER SUPPLY CONTROL METHOD

PLASMA PROCESSING APPARATUS AND POWER SUPPLY CONTROL METHOD

by OHSHITA TATSURO, NAGAMI KOICHI
Year of Publication 06.11.2019

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Patent

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

by TORII NATSUMI, NAGAMI KOICHI
Year of Publication 24.12.2018

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Patent

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

by OHSHITA TATSURO, NAGASEKI KAZUYA, NAGAMI KOICHI
Year of Publication 04.01.2022

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Patent

METHOD FOR IMPEDANCE MATCHING OF PLASMA PROCESSING APPARATUS

METHOD FOR IMPEDANCE MATCHING OF PLASMA PROCESSING APPARATUS

by NAGAMI KOICHI, YAMADA NORIKAZU
Year of Publication 04.05.2018

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Patent

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

by ABE JUN, KOSHIMIZU CHISHIO, TORII NATSUMI, NAGAMI KOICHI
Year of Publication 22.03.2023

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Patent

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

by MATSUMOTO KAZUYA, HAYASAKA YUSUKE, TAKAHASHI SHINGO, NAGAMI KOICHI, SASAKI ATSUSHI
Year of Publication 06.12.2022

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Patent

기판 처리 장치 및 기판 처리 방법

기판 처리 장치 및 기판 처리 방법

by NAGASHIMA NOZOMU, FUJIWARA NAOKI, TAMONOKI SHINYA, MATSUMOTO NAOKI, MIHARA NAOKI, ISHIKAWA SHINYA, NAGAMI KOICHI, ENDO HIROKI
Year of Publication 01.07.2024

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Patent

기판 처리 장치, 기판 처리 시스템, 전력 공급 시스템 및 전력 공급 방법

기판 처리 장치, 기판 처리 시스템, 전력 공급 시스템 및 전력 공급 방법

by FUJIWARA NAOKI, MATSUMOTO NAOKI, TAMONOKI SHINYA, MIHARA NAOKI, ISHIKAWA SHINYA, NAGAMI KOICHI
Year of Publication 01.07.2024

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Patent

FILTER CIRCUIT AND PLASMA PROCESSING APPARATUS

FILTER CIRCUIT AND PLASMA PROCESSING APPARATUS

by ISHIHARADA KOTA, YAMAGISHI KOJI, AOTA YUJI, NAGAMI KOICHI
Year of Publication 09.08.2022

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Patent

ETCHING APPARATUS AND ETCHING METHOD

ETCHING APPARATUS AND ETCHING METHOD

by MASUDA NORIIKI, SUZUKI TAKAYUKI, TORII NATSUMI, NAGAMI KOICHI
Year of Publication 08.06.2022

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Patent

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