Non uniform thermal oxidation of SiC and its impact on electrical characteristics
Nagai, Ryu, Hasunuma, Ryu, Yamabe, Kikuo
Published in Japanese Journal of Applied Physics (01.08.2016)
Published in Japanese Journal of Applied Physics (01.08.2016)
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Journal Article
Rapid wavelength scanning based on acousto-optically tuned external-cavity laser diode
Suzuki, Takamasa, Nagai, Ryu-ichi, Sasaki, Osami, Choi, Samuel
Published in Optics communications (01.09.2011)
Published in Optics communications (01.09.2011)
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Journal Article
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
TANAKA KOKI, YOKOI MASAHIKO, TANAKA KAZUMITSU, NAGAI RYU, SUDA RYUTARO
Year of Publication 07.03.2024
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Year of Publication 07.03.2024
Patent
DEVICE FOR TREATMENT WITH PLASMA AND SUBSTRATE-TREATING SYSTEM
MURAKAMI, Tomo, HARASHIMA, Takuya, HORI, Kenta, FUNADA, Shuji, KAKO, Takashi, TANAKA, Koki, NAGAI, Ryu, NIIYAMA, Koji, SUDA, Ryutaro
Year of Publication 29.02.2024
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Year of Publication 29.02.2024
Patent
PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM
TANAKA KOKI, MOTOKAWA KYURI, MINOURA YUYA, OMI MUNEYUKI, NAGAI RYU, SHIRAHAMA NOBUHIKO
Year of Publication 10.04.2023
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Year of Publication 10.04.2023
Patent