Thermal stability of Ni silicide films on heavily doped n + and p + Si substrates
Ahmet, Parhat, Shiozawa, Takashi, Nagahiro, Koji, Nagata, Takahiro, Kakushima, Kuniyuki, Tsutsui, Kazuo, Chikyow, Toyohiro, Iwai, Hiroshi
Published in Microelectronic engineering (01.07.2008)
Published in Microelectronic engineering (01.07.2008)
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Journal Article
Analysis of irregular increase in sheet resistance of Ni silicides on transition from NiSi to NiSi2
TSUTSUI, Kazuo, RUIFEI XIANG, NAGAHIRO, Koji, SHIOZAWA, Takashi, AHMET, Parhat, OKUNO, Yasutoshi, MATSUMOTO, Michikazu, KUBOTA, Masafumi, KAKUSHIMA, Kuniyuki, IWAI, Hiroshi
Published in Microelectronic engineering (01.02.2008)
Published in Microelectronic engineering (01.02.2008)
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Journal Article
Improvement of thermal stability of Ni silicide on N +–Si by direct deposition of group III element (Al, B) thin film at Ni/Si interface
Tsutsui, Kazuo, Shiozawa, Takashi, Nagahiro, Koji, Ohishi, Yoshihisa, Kakushima, Kuniyuki, Ahmet, Parhat, Urushihara, Nobuyuki, Suzuki, Mineharu, Iwai, Hiroshi
Published in Microelectronic engineering (01.10.2008)
Published in Microelectronic engineering (01.10.2008)
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Journal Article
Conference Proceeding
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MIYATA SATOE, TAKASHINO HIROYUKI, YOSHIMURA HISAO, MIURA TAKAHIRO, OHRI HIROYUKI, HAMASAKI TAKAHIRO, NAGAHIRO KOJI
Year of Publication 11.03.2022
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Year of Publication 11.03.2022
Patent
광 검출 장치
MIYATA SATOE, YOSHIMURA HISAO, MIURA TAKAHIRO, OHRI HIROYUKI, HAMASAKI TAKAHIRO, NAGAHIRO KOJI
Year of Publication 11.03.2022
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Year of Publication 11.03.2022
Patent
LIGHT DETECTION DEVICE
TAKASHINO, Hiroyuki, MIYATA, Satoe, HAMASAKI, Takahiro, NAGAHIRO, Koji, MIURA, Takahiro, YOSHIMURA, Hisao, OHRI, Hiroyuki
Year of Publication 21.01.2021
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Year of Publication 21.01.2021
Patent
LIGHT DETECTION DEVICE
MIYATA, Satoe, HAMASAKI, Takahiro, NAGAHIRO, Koji, MIURA, Takahiro, YOSHIMURA, Hisao, OHRI, Hiroyuki
Year of Publication 21.01.2021
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Year of Publication 21.01.2021
Patent