Subtractive etch interconnects
Simon, Andrew H, Filippi, Ronald G, Choi, Samuel S, Lustig, Naftali E, Bao, Junjing, Bonilla, Griselda
Year of Publication 08.01.2019
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Year of Publication 08.01.2019
Patent
Interconnect structure having subtractive etch feature and damascene feature
Simon, Andrew H, Filippi, Ronald G, Choi, Samuel S, Huang, Elbert E, Lustig, Naftali E, Bonilla, Griselda
Year of Publication 09.04.2019
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Year of Publication 09.04.2019
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Stacked via structure for metal fuse applications
Grunow, Stephan, Simon, Andrew H, Filippi, Ronald G, Lustig, Naftali E, Chanda, Kaushik, Bonilla, Griselda, Wang, Ping-Chuan
Year of Publication 12.03.2019
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Year of Publication 12.03.2019
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Forming air gap
Simon, Andrew H, Filippi, Ronald G, Choi, Samuel S, Huang, Elbert E, Lustig, Naftali E, Bonilla, Griselda
Year of Publication 05.03.2019
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Year of Publication 05.03.2019
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Detecting a void between a via and a wiring line
Simon, Andrew H, Filippi, Ronald G, Huang, Elbert E, Lustig, Naftali E, Bonilla, Griselda, Choi, Samuel S. S
Year of Publication 16.10.2018
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Year of Publication 16.10.2018
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INTERCONNECT SCALING
HUANG Elbert E, LUSTIG Naftali E, BONILLA Griselda, FILIPPI Ronald G, SIMON Andrew H, CHOI Samuel S
Year of Publication 15.03.2018
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Year of Publication 15.03.2018
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FORMING AIR GAP
Filippi Ronald G, Bonilla Griselda, Huang Elbert E, Choi Samuel S, Lustig Naftali E, Simon Andrew H
Year of Publication 15.03.2018
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Year of Publication 15.03.2018
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Graphene and metal interconnects
Naftali E Lustig, Samuel S Choi, Andrew H Simon, Junjing Bao, Ronald G Filippi, Griselda Bonilla
Year of Publication 22.02.2017
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Year of Publication 22.02.2017
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High performance refractory metal / copper interconnects to eliminate electromigration
Bonilla Griselda, Filippi Ronald G, Choi Samuel S, Lustig Naftali E, Bao Junjing, Simon Andrew H
Year of Publication 03.01.2017
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Year of Publication 03.01.2017
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Interconnect structure having substractive etch feature and damascene feature
Bonilla Griselda, Filippi Ronald G, Huang Elbert E, Choi Samuel S, Lustig Naftali E, Simon Andrew H
Year of Publication 26.12.2017
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Year of Publication 26.12.2017
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Structures and methods for determining TDDB reliability at reduced spacings using the structures
Filippi Ronald G, Kaltalioglu Erdem, Wang Ping-Chuan, Lustig Naftali E, Zhang Lijuan
Year of Publication 20.12.2016
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Year of Publication 20.12.2016
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FORMING AIR GAP
Filippi Ronald G, Bonilla Griselda, Huang Elbert E, Choi Samuel S, Lustig Naftali E, Simon Andrew H
Year of Publication 21.12.2017
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Year of Publication 21.12.2017
Patent
INTERCONNECT SCALING
Bonilla Griselda, Filippi Ronald G, Huang Elbert E, Choi Samuel S, Lustig Naftali E, Simon Andrew H
Year of Publication 03.08.2017
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Year of Publication 03.08.2017
Patent
SUBTRACTIVE ETCH INTERCONNECTS
FILIPPI RONALD G, SIMON ANDREW H, CHOI SAMUEL S, BAO JUNJING, LUSTIG NAFTALI E, BONILLA GRISELDA
Year of Publication 23.06.2016
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Year of Publication 23.06.2016
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