능동 학습에 기반한 결함 위치 식별
LIN CHENXI, NAFISI KOUROSH, KOU REN JAY, HASAN TANBIR, XU HUINA, ZOU YI, MOIN NABEEL NOOR
Year of Publication 07.07.2023
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Year of Publication 07.07.2023
Patent
Strain Relaxed Silicon Germanium Buffer Layers: From Growth to Integration Challenges
Dube, Abhishek, Huang, Yi-Chiau, Cherian, Benjamin, Nafisi, Kourosh, Chung, Hua, Chu, Schubert
Published in ECS transactions (18.08.2016)
Published in ECS transactions (18.08.2016)
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Journal Article
Improving tool efficiency through automated process window qualification
Nafisi, Kourosh, Stamper, Andrew, Park, Allen, Greer, Alexa, Chang, Ellis
Published in 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.07.2010)
Published in 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.07.2010)
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Conference Proceeding
Process Window Centering for 22 nm Lithography
Buengener, Ralf, Boye, Carol, Rhoads, Bryan N, Chong, Sang Y, Tejwani, Charu, Burns, Sean D, Stamper, Andrew D, Nafisi, Kourosh, Brodsky, Colin J, Fan, Susan S, Kini, Sumanth, Hahn, Roland
Published in IEEE transactions on semiconductor manufacturing (01.05.2011)
Published in IEEE transactions on semiconductor manufacturing (01.05.2011)
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Journal Article
Conference Proceeding
Voltage Contrast Inspection Methodology for Inline Detection of Missing Spacer and Other Nonvisual Defects : Advanced semiconductor manufacturing conference
PATTERSON, Oliver D, WU, Kevin, MOCUTA, Dan, NAFISI, Kourosh
Published in IEEE transactions on semiconductor manufacturing (2008)
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Published in IEEE transactions on semiconductor manufacturing (2008)
Journal Article
ACTIVE LEARNING-BASED DEFECT LOCATION IDENTIFICATION
Noor MOIN, Nabeel, HASAN, Tanbir, XU, Huina, LIN, Chenxi, ZOU, Yi, KOU, Ren-Jay, NAFISI, Kourosh
Year of Publication 14.12.2023
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Year of Publication 14.12.2023
Patent
Controlled Size, Nanometer-Scale, Reaction Vessels in Two Dimensions
Nafisi, Kourosh, Samu, Jeffrey, Hemminger, John C
Published in The journal of physical chemistry. B (09.11.2000)
Published in The journal of physical chemistry. B (09.11.2000)
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Journal Article
ACTIVE LEARNING-BASED DEFECT LOCATION IDENTIFICATION
MOIN, Nabeel, Noor, HASAN, Tanbir, XU, Huina, LIN, Chenxi, ZOU, Yi, KOU, Ren-Jay, NAFISI, Kourosh
Year of Publication 20.09.2023
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Year of Publication 20.09.2023
Patent
Process Window Centering for 22 nm lithography
Buengener, Ralf, Boye, C, Rhoads, B N, Chong, S Y, Tejwani, C, Burns, S D, Stamper, A D, Nafisi, K, Brodsky, C J, Fan, S S, Kini, S, Hahn, R
Published in 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.07.2010)
Published in 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.07.2010)
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Conference Proceeding
ACTIVE LEARNING-BASED DEFECT LOCATION IDENTIFICATION
HASAN, Tanbir, MOIN, Nabeel, XU, Huina, LIN, Chenxi, ZOU, Yi, KOU, Ren-Jay, NAFISI, Kourosh
Year of Publication 19.05.2022
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Year of Publication 19.05.2022
Patent
Imaging of crystalline defects
Lev, Uri, Wachs, Amir, Colombeau, Benjamin, Nafisi, Kourosh, Shemesh, Dror
Year of Publication 09.07.2019
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Year of Publication 09.07.2019
Patent
IMAGING OF CRYSTALLINE DEFECTS
Lev, Uri, Wachs, Amir, Colombeau, Benjamin, Nafisi, Kourosh, Shemesh, Dror
Year of Publication 13.06.2019
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Year of Publication 13.06.2019
Patent
Embedded Metal Voids Detection to Improve Copper Metallization for Advanced Interconnect
Tseng, Jennifer, Naik, Mehul, Kumar, Abhinav, Nafisi, Kourosh, Lee, Joung Joo, Wu, Zhiyuan, Moraes, Kevin, Fernandez, Jorge, Wachs, Amir, Shemesh, Dror
Published in 2018 IEEE International Interconnect Technology Conference (IITC) (01.06.2018)
Published in 2018 IEEE International Interconnect Technology Conference (IITC) (01.06.2018)
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Conference Proceeding