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"NABEYAMA YUKI"
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"NABEYAMA YUKI"
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GATE VALVE APPARATUS AND PLASMA PROCESSING APPARATUS
by
TANAKA SEIJI
,
NABEYAMA YUKI
Year of Publication
17.01.2018
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A GATE VALVE DEVICE AND A VACUUM PROCESS DEVIDE
by
NABEYAMA YUKI
Year of Publication
16.11.2010
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VACUUM DEVICE AND SUBSTRATE PROCESSING DEVICE
by
NABEYAMA YUKI
Year of Publication
26.07.2010
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VACUUM APPARATUS, VACUUM PROCESSING SYSTEM AND PRESSURE CONTROL METHOD OF A VACUUM CHAMBER
by
NABEYAMA YUKI
Year of Publication
01.07.2009
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GATE VALVE APPARATUS AND SUBSTRATE TREATMENT SYSTEM
by
SAEGUSA NAOYA
,
OMORI TAKASHI
,
ITO TAKESHI
,
NABEYAMA YUKI
Year of Publication
21.11.2018
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SUBSTRATE PROCESSING DEVICE AND ROD LOCKING DEVICE
by
OKABE SEIJI
,
NABEYAMA YUKI
Year of Publication
23.08.2011
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GATE VALVE DEVICE
by
SASAKI KAZUO
,
NABEYAMA YUKI
Year of Publication
06.10.2010
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LOAD LOCK APPARATUS AND VACUUM PROCESSING SYSTEM
by
WAKAMORI TSUTOMU
,
AMANO TSUTOMU
,
NABEYAMA YUKI
Year of Publication
14.06.2010
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GATE VALVE APPARATUS AND PLASMA PROCESSING APPARATUS
by
SEIJI TANAKA
,
YUKI NABEYAMA
Year of Publication
29.04.2015
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A GATE VALVE DEVICE, A VACUUM PROCESS DEVIDE AND A METHOD OF OPENING AND CLOSING A VALVE BODY IN THE GATE VALVE DEVICE
by
NABEYAMA YUKI
Year of Publication
12.05.2009
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TWI499733B
by
NABEYAMA
,
YUKI
Year of Publication
11.09.2015
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TWI642868B
by
TANAKA, SEIJI
,
NABEYAMA
,
YUKI
Year of Publication
01.12.2018
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TWI471896B
by
NABEYAMA
,
YUKI
Year of Publication
01.02.2015
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TWI439623B
by
NABEYAMA
,
YUKI
Year of Publication
01.06.2014
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TWI759470B
by
ITO, TAKESHI
,
SAEGUSA, NAOYA
,
OMORI, TAKASHI
,
NABEYAMA
,
YUKI
Year of Publication
01.04.2022
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Vacuum device and substrate processing device
by
NABEYAMA YUKI
Year of Publication
04.07.2012
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TWI517284B
by
OKABE, SEIJI
,
NABEYAMA
,
YUKI
Year of Publication
11.01.2016
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Gate valve apparatus and plasma processing apparatus
by
TANAKA, SEIJI
,
NABEYAMA
,
YUKI
Year of Publication
01.09.2015
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Vacuum device and substrate processing device
by
NABEYAMA
,
YUKI
Year of Publication
16.11.2010
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Vacuum device and substrate processing device
by
NABEYAMA YUKI
Year of Publication
04.08.2010
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