Microstructure Formation on Polytetrafluoroethylene (PTFE) and Perfluoroalkoxy (PFA) Bulk Plates by a Magnetron Enhanced Reactive Ion Etching System
NABESAWA, Hirofumi, HITOBO, Takeshi, ASAJI, Toyohisa, ABE, Takashi, SEKI, Minoru
Published in Journal of the Vacuum Society of Japan (2017)
Published in Journal of the Vacuum Society of Japan (2017)
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Journal Article
Low-pressure plasma-etching of bulk polymer materials using gas mixture of CF4 and O2
Nabesawa, Hirofumi, Hiruma, Takaharu, Hitobo, Takeshi, Wakabayashi, Suguru, Asaji, Toyohisa, Abe, Takashi, Seki, Minoru
Published in AIP advances (01.11.2013)
Published in AIP advances (01.11.2013)
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プラズマエッチングによるマイクロ流体チップ用チタン製微細金型製造技術の開発
人母, 岳, 城木, 正博, 鍋澤, 浩文, 浅地, 豊久, 安部, 隆
Published in Journal of the Vacuum Society of Japan (01.01.2017)
Published in Journal of the Vacuum Society of Japan (01.01.2017)
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Journal Article
Low-pressure plasma-etching of bulk polymer materials using gas mixture of CF{sub 4} and O{sub 2}
Nabesawa, Hirofumi, Central Research Institute, Toyama Industrial Technology Center, Takaoka, 933-0981, Hiruma, Takaharu, Seki, Minoru, Hitobo, Takeshi, Wakabayashi, Suguru, Asaji, Toyohisa, Electronic-Mechanical Engineering Department, Oshima National College of Maritime Technology, Suo-Oshima, 742-2193, Abe, Takashi
Published in AIP advances (15.11.2013)
Published in AIP advances (15.11.2013)
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Journal Article
Microwell array chip and method of manufacturing same
MURAGUCHI ATSUSHI, NABESAWA HIROFUMI, TANINO KATSUMI, TOKIMITSU YOSHIHARU, KONDO SACHIKO, TAKABAYASHI SOTOHIRO, KISHI HIROYUKI, OBATA TSUTOMU, YOKOYAMA YOSHIYUKI, FUJIKI SATOSHI
Year of Publication 12.04.2016
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Year of Publication 12.04.2016
Patent
Chip med mikrobrøndsarray og fremgangsmåde til fremstilling heraf
TANINO, KATSUMI, YOKOYAMA, YOSHIYUKI, TAKABAYASHI, SOTOHIRO, OBATA, TSUTOMU, MURAGUCHI, ATSUSHI, TOKIMITSU, YOSHIHARU, FUJIKI, SATOSHI, KISHI, HIROYUKI, KONDO, SACHIKO, NABESAWA, HIROFUMI
Year of Publication 15.04.2013
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Year of Publication 15.04.2013
Patent
MANUFACTURING METHOD OF MICRO PILLAR ARRAY ELEMENT, MANUFACTURING DEVICE AND MICRO PILLAR ARRAY ELEMENT
NABESAWA HIROFUMI, WAKABAYASHI TAKASHI, NAKATANI ISAO, HITOBO TAKESHI
Year of Publication 13.03.2008
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Year of Publication 13.03.2008
Patent