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Formation of SiC nanoparticles in an atmospheric microwave plasma

by Vennekamp, Martin, Bauer, Ingolf, Groh, Matthias, Sperling, Evgeni, Ueberlein, Susanne, Myndyk, Maksym, Mäder, Gerrit, Kaskel, Stefan
Published in Beilstein journal of nanotechnology (07.10.2011)

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Journal Article

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Investigation of Side Wall Loss for Development of 6 µm Microbumps for 3D/2.5D Integration

by Shehzad, Adil, Myndyk, Maksym, Junghaehnel, Manuela, Panchenko, Juliana
Published in 2024 IEEE 10th Electronics System-Integration Technology Conference (ESTC) (11.09.2024)

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Conference Proceeding

Formation of SiC nanoparticles in an atmospheric microwave plasma

Investigation of Side Wall Loss for Development of 6 µm Microbumps for 3D/2.5D Integration

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