Dose Dependence of Nanocrystal Formation in Helium-Implanted Silicon Layers
Lomov, A. A., Myakon’kikh, A. V., Chesnokov, Yu. M., Denisov, V. V., Kirichenko, A. N., Denisov, V. N.
Published in Technical physics letters (01.04.2018)
Published in Technical physics letters (01.04.2018)
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Journal Article
Study of the amorphization of surface silicon layers implanted by low-energy helium ions
Lomov, A. A., Myakon’kikh, A. V., Oreshko, A. P., Shemukhin, A. A.
Published in Crystallography reports (01.03.2016)
Published in Crystallography reports (01.03.2016)
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Journal Article
Chiral Thin Film Structures Based on Arrays of Cobalt Nanohelices Obtained By Oblique Deposition
Trushin, O. S., Fattakhov, I. S., Popov, A. A., Mazaletsky, L. A., Gaidukasov, R. A., Myakonkikh, A. V.
Published in Bulletin of the Russian Academy of Sciences. Physics (01.09.2024)
Published in Bulletin of the Russian Academy of Sciences. Physics (01.09.2024)
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Journal Article
Plasma etching of poly-Si/SiO2/Si structures: Langmuir-probe and optical-emission-spectroscopy monitoring
Rudenko, K. V., Myakon’kikh, A. V., Orlikovsky, A. A.
Published in Russian microelectronics (01.05.2007)
Published in Russian microelectronics (01.05.2007)
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Journal Article
New method for the Langmuir probe diagnostics of polymerizing plasmas
Rudenko, K. V., Myakon’kikh, A. V., Orlikovsky, A. A., Pustovit, A. N.
Published in Russian microelectronics (01.02.2007)
Published in Russian microelectronics (01.02.2007)
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Journal Article
Influence of the Finite-Size Effect on the Cluster Ion Emission of Silicon Nanostructures
Tolstoguzov, A. B., Drozdov, M. N., Ieshkin, A. E., Tatarintsev, A. A., Myakon’kikh, A. V., Belykh, S. F., Korobeishchikov, N. G., Pelenovich, V. O., Fu, D. J.
Published in JETP letters (01.04.2020)
Published in JETP letters (01.04.2020)
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Journal Article
Monte Carlo Simulation of Defects of a Trench Profile in the Process of Deep Reactive Ion Etching of Silicon
Rudenko, M. K., Myakon’kikh, A. V., Lukichev, V. F.
Published in Russian microelectronics (01.05.2019)
Published in Russian microelectronics (01.05.2019)
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Journal Article
Helium Bubbles Formed in Si(001) Layers after High-Dose Implantation and Thermal Annealing
Lomov, A. A., Myakonkikh, A. V., Chesnokov, Yu. M.
Published in Russian microelectronics (01.05.2018)
Published in Russian microelectronics (01.05.2018)
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Journal Article
Investigation of the Process of Plasma Through Etching of HkMG Stack of Nanotransistor with a 32-nm Critical Dimension
Myakonkikh, A. V., Kuvaev, K. Yu, Tatarintsev, A. A., Orlikovskii, N. A., Rudenko, K. V., Guschin, O. P., Gornev, E. S.
Published in Russian microelectronics (01.09.2018)
Published in Russian microelectronics (01.09.2018)
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Journal Article
Formation of PZT Structures on Silicon
Seregin, D. S., Baziruvikha, A. -M., Kotova, N. M., Vorotilov, K. A., Delimova, L. A., Zaitzeva, N. V., Myakon’kikh, A. V., Rudenko, K. V., Lukichev, V. F.
Published in Bulletin of the Russian Academy of Sciences. Physics (01.03.2018)
Published in Bulletin of the Russian Academy of Sciences. Physics (01.03.2018)
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