Search Results - "Mutyala, Madhu Santosh Kumar" :: K.UTB vyhledávací portál

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용량 결합 플라즈마를 사용한 실리콘 산화물 갭 충전

by YU HANG, MUTYALA MADHU SANTOSH KUMAR, PADHI DEENESH
Year of Publication 12.07.2023

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다중 구역 정전 척

by MUTYALA MADHU SANTOSH KUMAR, PADHI DEENESH, KAMATH SANJAY
Year of Publication 12.08.2022

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플라즈마 증착을 위한 개시 조절

by MUTYALA MADHU SANTOSH KUMAR, PADHI DEENESH, KAMATH SANJAY
Year of Publication 26.07.2022

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표면 인케이싱 재료 층

by MUTYALA MADHU SANTOSH KUMAR, PADHI DEENESH, KAMATH SANJAY
Year of Publication 01.07.2022

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프로세싱 챔버들을 위한 개선된 아이솔레이터

by PEMMASANI SAKETH, MUTYALA MADHU SANTOSH KUMAR, DHANAKSHIRUR AKSHAY, KULKARNI MAYUR GOVIND
Year of Publication 15.12.2023

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국지화된 이온 강화 플라즈마(IEP)를 통한 웨이퍼 불균일성 수정

by PEMMASANI SAKETH, MUTYALA MADHU SANTOSH KUMAR, DHANAKSHIRUR AKSHAY, KULKARNI MAYUR GOVIND, PAUL KHOKAN CHANDRA
Year of Publication 22.05.2023

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두께 보정을 위한 메사 높이 변조

by PEMMASANI SAKETH, YU HANG, MUTYALA MADHU SANTOSH KUMAR, DHANAKSHIRUR AKSHAY, KULKARNI MAYUR GOVIND, PADHI DEENESH
Year of Publication 23.02.2024

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에지 불균일성 튜닝을 위한 낮은 임피던스 전류 경로

by PEMMASANI SAKETH, YU HANG, MUTYALA MADHU SANTOSH KUMAR, DHANAKSHIRUR AKSHAY, KULKARNI MAYUR GOVIND, PADHI DEENESH
Year of Publication 19.01.2024

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가장자리 플라즈마 변조를 위한 성형된 샤워헤드

by PEMMASANI SAKETH, YU HANG, MUTYALA MADHU SANTOSH KUMAR, RAJ DAEMIAN RAJ BENJAMIN, LI XIAOPU, DHANAKSHIRUR AKSHAY, KULKARNI MAYUR GOVIND, PADHI DEENESH
Year of Publication 29.02.2024

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RF RF CONTINUOUS AND PULSED RF PLASMA FOR ETCHING METALS

by CHANDRASHEKAR ANAND, MUTYALA MADHU SANTOSH KUMAR
Year of Publication 08.03.2018

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다중 채널 분할기 스풀

by MUTYALA MADHU SANTOSH KUMAR, PADHI DEENESH, BARMAN ARKAJIT ROY, KAMATH SANJAY
Year of Publication 15.09.2021

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다층 PECVD TEOS 산화물 막 내의 결함들을 감소시키는 방법

by YU HANG, MUTYALA MADHU SANTOSH KUMAR, KESHRI ABHIGYAN, RAJ DAEMIAN RAJ BENJAMIN, HOWLADER RANA, PADHI DEENESH, YE ZHENG JOHN, KAMATH SANJAY
Year of Publication 14.06.2023

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Methods for pressure ramped plasma purge

by Mutyala, Madhu Santosh Kumar, Padhi, Deenesh, Kamath, Sanjay
Year of Publication 14.11.2023

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Initiation modulation for plasma deposition

by Mutyala, Madhu Santosh Kumar, Padhi, Deenesh, Kamath, Sanjay
Year of Publication 30.08.2022

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Low impedance current path for edge non-uniformity tuning

by Dhanakshirur, Akshay, Yu, Hang, Kulkarni, Mayur Govind, Mutyala, Madhu Santosh Kumar, Pemmasani, Saketh, Padhi, Deenesh
Year of Publication 12.03.2024

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SILICON OXIDE GAP FILL USING CAPACITIVELY COUPLED PLASMAS

by Yu, Hang, Mutyala, Madhu Santosh Kumar, Padhi, Deenesh
Year of Publication 19.05.2022

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Mesa height modulation for thickness correction

by Dhanakshirur, Akshay, Yu, Hang, Kulkarni, Mayur Govind, Mutyala, Madhu Santosh Kumar, Pemmasani, Saketh, Padhi, Deenesh
Year of Publication 09.01.2024

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