Backside Power Distribution for Nanosheet Technologies Beyond 2nm
Xie, Ruilong, Hong, Wonhyuk, Zhang, Chen, Lee, Jongjin, Brew, Kevin, Johnson, Richard, Lanzillo, Nicholas, Shobha, Hosadurga, Kim, Taesun, Park, Panjae, Mochizuki, Shogo, Saraf, Iqbal, Park, Chanro, Zhuang, Lei, Osborn, Clifford, Li, Wai Kin, Liu, Feng, Sankarapandian, Muthumanickam, Yang, Chung Ju, Li, Juntao, Tierney, Lukas, Pujari, Ruturaj, Sulehria, Yasir, Song, Yuncheng, Zhou, Huimei, Wang, Miaomiao, Belyansky, Michael, Ghosh, Somnath, Zhang, Haojun, Motoyama, Koichi, Sarkar, Debarghya, Kim, Wukang, Chu, Albert, Li, Tao, Carta, Fabio, Gluschenkov, Oleg, Oh, Joongsuk, Malley, Matthew, Chu, Pinlei, Nguyen, Son, Luedders, Katherine, Lee, Joe, Khan, Shahrukh, Chowdhury, Prabudhya Roy, Huang, Huai, Shadman, Abir, Sieg, Stuart, Dechene, Daniel, Edelstein, Daniel, Arnold, John, Yamashita, Tenko, Choi, Kisik, Seo, Kang-ill, Guo, Dechao, Bu, Huiming
Published in 2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (16.06.2024)
Published in 2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (16.06.2024)
Get full text
Conference Proceeding
Gate-Cut-Last in RMG to Enable Gate Extension Scaling and Parasitic Capacitance Reduction
Greene, Andrew, Zhou, Huimei, Xie, Ruilong, Park, Chanro, Economikos, Laertis, Chan, Victor, Akarvardar, Kerem, Bao, Ruqiang, Seshadri, Indira, Conti, Richard, Wang, Miaomiao, Sankarapandian, Muthumanickam, Demarest, James, Li, Juntao, Jiang, Liying, Zhao, Kai, Robison, Robert, Ando, Takashi, Cave, Nigel, Knorr, Andreas, Gupta, Dinesh, Kanakasabapathy, Sivananda, Guo, Dechao, Haran, Bala, Basker, Veeraraghavan, Bu, Huiming
Published in 2019 Symposium on VLSI Technology (01.06.2019)
Published in 2019 Symposium on VLSI Technology (01.06.2019)
Get full text
Conference Proceeding
56 nm pitch Cu dual-damascene interconnects with self-aligned via using negative-tone development Lithography-Etch-Lithography-Etch patterning scheme
LOQUET, Yannick, MIGNOT, Yann, MORRIS, Bryan, KLEEMEIER, Walter, LINIGER, E, SPOONER, Terry, WASKIEWICZ, Christopher, CHEN, James Hsueh-Chung, SANKARAPANDIAN, Muthumanickam, CHEN, Shyng-Tsong, FLAITZ, Philip, TOMIZAWA, Hideyuki, TSENG, Chia-Hsun, BEARD, Marcy
Published in Microelectronic engineering (01.07.2013)
Published in Microelectronic engineering (01.07.2013)
Get full text
Conference Proceeding
Journal Article
56nm pitch Cu dual-damascene interconnects with self-aligned via using negative-tone development Lithography-Etch-Lithography-Etch patterning scheme
Loquet, Yannick, Mignot, Yann, Waskiewicz, Christopher, Chen, James Hsueh-Chung, Sankarapandian, Muthumanickam, Chen, Shyng-Tsong, Flaitz, Philip, Tomizawa, Hideyuki, Tseng, Chia-Hsun, Beard, Marcy, Morris, Bryan, Kleemeier, Walter, Liniger, E., Spooner, Terry
Published in Microelectronic engineering (01.07.2013)
Published in Microelectronic engineering (01.07.2013)
Get full text
Journal Article
TiN Metal Hard Mask Removal with Selectivity to Tungsten and TiN Liner
Lippy, Steven, Chen, Li-Min, Peethala, Brown, Rath, David L, Boggs, Karl, Sankarapandian, Muthumanickam, Kennedy, Evelyn
Published in ECS transactions (31.08.2013)
Published in ECS transactions (31.08.2013)
Get full text
Journal Article
Maskless alignment scheme for BEOL memory array manufacturing
Seo, Soon-Cheon, Kong, Dexin, Sankarapandian, Muthumanickam, Patlolla, Raghuveer Reddy
Year of Publication 01.10.2024
Get full text
Year of Publication 01.10.2024
Patent
Epitaxy Everywhere Based Self-Aligned Direct Backside Contact
Mochizuki, Shogo, Choi, Kisik, Xie, Ruilong, Sankarapandian, Muthumanickam
Year of Publication 28.03.2024
Get full text
Year of Publication 28.03.2024
Patent
MULTILAYER WORK FUNCTION METAL IN NANOSHEET STACKS USING A SACRIFICIAL OXIDE MATERIAL
BAO, RUQIANG, Sankarapandian, Muthumanickam, Watanabe, Koji, Zhang, Jingyun
Year of Publication 15.06.2023
Get full text
Year of Publication 15.06.2023
Patent
MULTILAYER WORK FUNCTION METAL IN NANOSHEET STACKS USING A SACRIFICIAL OXIDE MATERIAL
SANKARAPANDIAN, Muthumanickam, BAO, Ruqiang, WATANABE, Koji, ZHANG, Jingyun
Year of Publication 15.06.2023
Get full text
Year of Publication 15.06.2023
Patent
MASKLESS ALIGNMENT SCHEME FOR BEOL MEMORY ARRAY MANUFACTURING
Seo, Soon-Cheon, Kong, Dexin, Sankarapandian, Muthumanickam, Patlolla, Raghuveer Reddy
Year of Publication 11.05.2023
Get full text
Year of Publication 11.05.2023
Patent
Inner spacer formation for nanosheet transistors
Liu, Chi-Chun, Song, Yi, Chao, Robin Hsin Kuo, Sankarapandian, Muthumanickam
Year of Publication 23.07.2024
Get full text
Year of Publication 23.07.2024
Patent
PHASE CHANGE MEMORY CELL WITH SPACER
OK, Injo, SANKARAPANDIAN, Muthumanickam, MCDERMOTT, Steven, SIMON, Andrew, SARAF, Iqbal, SAULNIER, Nicole
Year of Publication 26.06.2024
Get full text
Year of Publication 26.06.2024
Patent
Confined bridge cell phase change memory
Simon, Andrew Herbert, Brew, Kevin W, McDermott, Steven Michael, Ok, Injo, Sankarapandian, Muthumanickam, Saulnier, Nicole
Year of Publication 07.05.2024
Get full text
Year of Publication 07.05.2024
Patent
Phase change memory cell spacer
Simon, Andrew Herbert, McDermott, Steven Michael, Ok, Injo, Saraf, Iqbal Rashid, Sankarapandian, Muthumanickam, Saulnier, Nicole
Year of Publication 12.03.2024
Get full text
Year of Publication 12.03.2024
Patent