PHASENWECHSELSPEICHERZELLE
Brew, Kevin, Mehta, Sanjay, Simon, Andrew Herbert, Ok, Injo, Saraf, Iqbal Rashid, Sankarapandian, Muthumanickam, Saulnier, Nicole, Bao, Ruqiang
Year of Publication 07.09.2023
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Year of Publication 07.09.2023
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Undercut control in isotropic wet etch processes
Schmidt, Kristin, De Silva, Ekmini Anuja, Liu, Chi-Chun, Yeung, Chun Wing, Arellano, Noel, Chao, Robin Hsin Kuo, Bi, Zhenxing, Sankarapandian, Muthumanickam
Year of Publication 06.08.2019
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Year of Publication 06.08.2019
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Channel protection during fin fabrication
Karve Gauri, Arndt Russell H, Sankarapandian Muthumanickam, He Hong, Lie Fee Li
Year of Publication 15.11.2016
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Year of Publication 15.11.2016
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Particle removal with minimal etching of silicon-germanium
SANKARAPANDIAN MUTHUMANICKAM, FOSTER JOHN, LIN SEAN, BENTLEY STEVEN, RATH DAVE, XIE RUILONG
Year of Publication 23.06.2016
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Year of Publication 23.06.2016
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Dual hard mask lithography process
YIN YUNPENG, BURNS SEAN D, SANKARAPANDIAN MUTHUMANICKAM, HOLMES STEVEN J, HORAK DAVID V, ARNOLD JOHN C
Year of Publication 21.06.2016
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Year of Publication 21.06.2016
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Spacer replacement for replacement metal gate semiconductor devices
PONOTH SHOM S, STANDAERT THEODORUS E, SANKARAPANDIAN MUTHUMANICKAM, YAMASHITA TENKO, MEHTA SANJAY C
Year of Publication 21.06.2016
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Year of Publication 21.06.2016
Patent
Spacer replacement for replacement metal gate semiconductor devices
PONOTH SHOM S, STANDAERT THEODORUS E, SANKARAPANDIAN MUTHUMANICKAM, YAMASHITA TENKO, MEHTA SANJAY C
Year of Publication 27.10.2015
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Year of Publication 27.10.2015
Patent
HARDMASK FACETING FOR ENHANCING METAL FILL IN TRENCHES
VAN DER STRATEN OSCAR, YIN YUNPENG, SANKARAPANDIAN MUTHUMANICKAM, CHEN SHYNG-TSONG, MIGNOT YANN, ARNOLD JOHN C
Year of Publication 06.08.2015
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Year of Publication 06.08.2015
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Improved SiCOH Hardmask with Graded Transition Layers
NGUYEN SON V, SANKARAPANDIAN MUTHUMANICKAM, SHOBHA HOSADURGA, LOQUET YANNICK S, MIGNOT YANN A, ANGYAL MATTHEW S
Year of Publication 29.01.2015
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Year of Publication 29.01.2015
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Dual hard mask lithography process
JOHN C ARNOLD, STEVEN J HOLMES, YUNPENG YIN, SEAN D BURNS, DAVID V HORAK, MUTHUMANICKAM SANKARAPANDIAN
Year of Publication 28.01.2015
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Year of Publication 28.01.2015
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SPACER REPLACEMENT FOR REPLACEMENT METAL GATE SEMICONDUCTOR DEVICES
PONOTH SHOM S, STANDAERT THEODORUS E, SANKARAPANDIAN MUTHUMANICKAM, YAMASHITA TENKO, MEHTA SANJAY C
Year of Publication 22.01.2015
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Year of Publication 22.01.2015
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SiCOH hardmask with graded transition layers
NGUYEN SON V, SANKARAPANDIAN MUTHUMANICKAM, SHOBHA HOSADURGA, LOQUET YANNICK S, MIGNOT YANN A, ANGYAL MATTHEW S
Year of Publication 06.01.2015
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Year of Publication 06.01.2015
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Dual hard mask lithography process
YIN YUNPENG, BURNS SEAN D, SANKARAPANDIAN MUTHUMANICKAM, HOLMES STEVEN J, HORAK DAVID V, ARNOLD JOHN C
Year of Publication 23.12.2014
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Year of Publication 23.12.2014
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Titanium-Nitride Removal
VAN DER STRATEN OSCAR, SANKARAPANDIAN MUTHUMANICKAM, RATH DAVID L, CHEN SHYNG-TSONG, FITZSIMMONS JOHN A
Year of Publication 23.10.2014
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Year of Publication 23.10.2014
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