High quality interfacial layer formation for Si0.75Ge0.25 (100) high-k metal gate stack
Siddiqui, S., Galatage, R., Zhao, W., Muthinti, G. Raja, Fronheiser, J., Srinivasan, P., Triyoso, D.H., Sporer, R., Jagannathan, H., Haran, B., Knorr, A.
Published in Microelectronic engineering (15.02.2020)
Published in Microelectronic engineering (15.02.2020)
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Journal Article
Self-Allancd Gate Contact (SAGC) for CMOS technology scaling beyond 7nm
Xie, Ruilong, Park, Chanro, Conti, Richard, Robison, Robert, Zhou, Huimei, Saraf, Iqbal, Carr, Adra, Fan, Susan Su Chen, Ryan, Kevin, Belyansky, Michael, Pancharatnam, Shanti, Young, Albert, Wang, Junli, Greene, Andrew, Cheng, Kangguo, Li, Juntao, Conte, Richard, Tang, Hao, Choi, Kisik, Amanapu, Hari, Peethala, Brown, Muthinti, Raja, Raymond, Mark, Prindle, Christopher, Liang, Yong, Tsai, Stan, Kamineni, Vimal, Labonte, Andre, Cave, Nigel, Gupta, Dinesh, Basker, Veeraraghavan, Loubet, Nicolas, Guo, Dechao, Haran, Bala, Knorr, Andreas, Bu, Huiming
Published in 2019 Symposium on VLSI Technology (01.06.2019)
Published in 2019 Symposium on VLSI Technology (01.06.2019)
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Conference Proceeding
Stress and Strain Evolution in Stacked Gate-All-Around Transistors for Sub-7nm Node Studied By Advanced Transmission Electron Microscopy Techniques and Finite Element Method Modelling
Reboh, Shay, Coquand, Rémi, Loubet, Nicolas, Bernier, Nicolas, Chao, Robin, Audoit, Guillaume, Rouviere, Jean-Luc, Barraud, Sylvain, Augendre, Emmanuel, Li, Juntao, Muthinti, Raja, Gaudiello, John, Gambacorti, Narciso, Yamashita, Tenko, Faynot, Olivier
Published in Meeting abstracts (Electrochemical Society) (13.04.2018)
Published in Meeting abstracts (Electrochemical Society) (13.04.2018)
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Journal Article
(Invited) Epitaxy of (SiGe/Si) Superlattices for the Fabrication of Horizontal Gate-All-Around Nanosheet Transistors
Loubet, Nicolas J, Li, Juntao, Chao, Robin, Yeung, Chunwing, Frougier, Julien, Durfee, Curtis, Arceo de la Pena, Abraham, Muthinti, Raja, Bi, Zhenxing, Sankarapandian, Muthumanickam, Xu, Wenyu, Mignot, Yann, Sieg, Stuart, Conti, Richard, Veeraraghavan, Basker, Jagannathan, Hemanth, Haran, Bala, Divakaruni, Rama, Bu, Huiming
Published in Meeting abstracts (Electrochemical Society) (23.07.2018)
Published in Meeting abstracts (Electrochemical Society) (23.07.2018)
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Journal Article
Density scaling beyond the FinFET: Architecture considerations for gate-all-around CMOS
Guillorn, Michael A., Loubet, Nicolas J., Chun-Wing Yeung, Chao, Robin, Muthinti, Raja, Demarest, James, Robison, Robert, Xin Miao, Jingyun Zhang, Hook, Terry, Oldiges, Phil, Yamashita, Tenko
Published in 2016 74th Annual Device Research Conference (DRC) (01.06.2016)
Published in 2016 74th Annual Device Research Conference (DRC) (01.06.2016)
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Conference Proceeding
Secure fingerprinting of a trusted photomask
Karve, Gauri, Muthinti, Gangadhara Raja, Halle, Scott David, Bonam, Ravi K, Leobandung, Effendi
Year of Publication 10.09.2024
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Year of Publication 10.09.2024
Patent
THREE-DIMENSIONAL ROUGHNESS EXTRACTION OF METAL
Clevenger, Lawrence A, Penny, Christopher J, Motoyama, Koichi, MUTHINTI, GANGADHARA RAJA
Year of Publication 08.06.2023
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Year of Publication 08.06.2023
Patent
SECURE FINGERPRINTING OF A TRUSTED PHOTOMASK
HALLE, Scott David, MUTHINTI, Gangadhara Raja, LEOBANDUNG, Effendi, KARVE, Gauri, BONAM, Ravi K
Year of Publication 13.04.2023
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Year of Publication 13.04.2023
Patent
Multi-channel overlay metrology
Muthinti, Gangadhara Raja, Kanakasabapathy, Siva, Felix, Nelson, Koay, Chiew-Seng
Year of Publication 06.07.2021
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Year of Publication 06.07.2021
Patent
Hybridization for characterization and metrology
Muthinti, Gangadhara Raja, Cepler, Aron, Koret, Roy, Sendelbach, Matthew, Lee, Wei Ti
Year of Publication 05.04.2022
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Year of Publication 05.04.2022
Patent