New mask design approach for UV laser micromachining to reduce stitching errors
Mutapcic, Emir, Iovenitti, Pio, Hayes, Jason
Published in International journal of advanced manufacturing technology (01.07.2009)
Published in International journal of advanced manufacturing technology (01.07.2009)
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Journal Article
A 3D-CAM system for quick prototyping and microfabrication using excimer laser micromachining
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Conference Proceeding
Journal Article