Investigation of source materials, co-gases, and methods for aluminum ion implantation
Tang, Ying, Jones, Ed, Despres, Joseph, Murthi, Kavita, Sweeney, Joseph
Published in MRS advances (08.12.2022)
Published in MRS advances (08.12.2022)
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Journal Article
흡착제 및 이를 포함하는 유체 공급 패키지 및 장치
MURTHI KAVITA, DESPRES JOSEPH R, PETRUSKA MELISSA A, MARLOW MATTHEW THOMAS, SCANNELL CHRISTOPHER, ELZER DANIEL, BYL OLEG, CARRUTHERS J. DONALD, LURCOTT STEVEN M, WILSON SHAUN M, TANG YING, STURM EDWARD A, WODJENSKI MICHAEL J, HENDRIX BRYAN C, SWEENEY JOSEPH D, DUBOIS LAWRENCE H
Year of Publication 16.07.2018
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Year of Publication 16.07.2018
Patent
Next Generation Safe Delivery Source® (SDS4®) Dopant Material Storage and Delivery Package
Scannell, Christopher, Sturm, Edward, Byl, Oleg, Despres, Joseph, Murthi, Kavita
Published in 2018 22nd International Conference on Ion Implantation Technology (IIT) (01.09.2018)
Published in 2018 22nd International Conference on Ion Implantation Technology (IIT) (01.09.2018)
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Conference Proceeding
GAS SUPPLY PACKAGES, ADSORBENTS, AND RELATED METHODS
Elzer, Daniel, Sturm, Edward A, Despres, Joseph R, Wodjenski, Michael J, Dubois, Lawrence H, Lurcott, Steven M, Marlow, Matthew Thomas, Petruska, Melissa A, Tang, Ying, Murthi, Kavita, Wilson, Shaun M, Scannell, Christopher, Hendrix, Bryan C, Carruthers, Donald J, Byl, Oleg, Sweeney, Joseph D
Year of Publication 02.12.2021
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Year of Publication 02.12.2021
Patent
ADSORBENTS AND FLUID SUPPLY PACKAGES AND APPARATUS COMPRISING SAME
Elzer, Daniel, Sturm, Edward A, Despres, Joseph R, Wodjenski, Michael J, Dubois, Lawrence H, Lurcott, Steven M, Marlow, Matthew Thomas, Petruska, Melissa A, Tang, Ying, Murthi, Kavita, Wilson, Shaun M, Scannell, Christopher, Hendrix, Bryan C, Carruthers, Donald J, Byl, Oleg, Sweeney, Joseph D
Year of Publication 02.07.2020
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Year of Publication 02.07.2020
Patent
ADSORBENTS AND FLUID SUPPLY PACKAGES AND APPARATUS COMPRISING SAME
SWEENEY, Joseph D, DESPRES, Joseph R, LURCOTT, Steven M, BYL, Oleg, TANG, Ying, MARLOW, Matthew Thomas, CARRUTHERS, J. Donald, WODJENSKI, Michael J, MURTHI, Kavita, HENDRIX, Bryan C, SCANNELL, Christopher, STURM, Edward A, DUBOIS, Lawrence H, WILSON, Shaun M, PETRUSKA, Melissa A, ELZER, Daniel
Year of Publication 22.06.2017
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Year of Publication 22.06.2017
Patent
ADSORBENTS AND FLUID SUPPLY PACKAGES AND APPARATUS COMPRISING SAME
SWEENEY, Joseph D, DESPRES, Joseph R, LURCOTT, Steven M, BYL, Oleg, TANG, Ying, MARLOW, Matthew Thomas, CARRUTHERS, J. Donald, WODJENSKI, Michael J, MURTHI, Kavita, HENDRIX, Bryan C, SCANNELL, Christopher, STURM, Edward A, DUBOIS, Lawrence H, WILSON, Shaun M, PETRUSKA, Melissa A, ELZER, Daniel
Year of Publication 11.05.2017
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Year of Publication 11.05.2017
Patent
Adsorbents and fluid supply packages and apparatus comprising same
CARRUTHERS, J. DONALD, WODJENSKI, MICHAEL J, DUBOIS, LAWRENCE H, SWEENEY, JOSEPH D, STURM, EDWARD A, HENDRIX, BRYAN C, SCANNELL, CHRISTOPHER, BYL, OLEG, MARLOW, MATTHEW THOMAS, PETRUSKA, MELISSA A, WILSON, SHAUN M, DESPRES, JOSEPH R, TANG, YING, ELZER, DANIEL, MURTHI, KAVITA, LURCOTT, STEVEN M
Year of Publication 01.12.2021
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Year of Publication 01.12.2021
Patent
Adsorbents and fluid supply packages and apparatus comprising same
CARRUTHERS, J. DONALD, WODJENSKI, MICHAEL J, DUBOIS, LAWRENCE H, SWEENEY, JOSEPH D, STURM, EDWARD A, HENDRIX, BRYAN C, SCANNELL, CHRISTOPHER, BYL, OLEG, MARLOW, MATTHEW THOMAS, PETRUSKA, MELISSA A, WILSON, SHAUN M, DESPRES, JOSEPH R, TANG, YING, ELZER, DANIEL, MURTHI, KAVITA, LURCOTT, STEVEN M
Year of Publication 01.09.2021
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Year of Publication 01.09.2021
Patent
ADSORBENTS AND FLUID SUPPLY PACKAGES AND APPARATUS COMPRISING SAME
MURTHI KAVITA, DESPRES JOSEPH R, PETRUSKA MELISSA A, MARLOW MATTHEW THOMAS, SCANNELL CHRISTOPHER, ELZER DANIEL, BYL OLEG, LURCOTT STEVEN M, WILSON SHAUN M, TANG YING, CARRUTHERS J DONALD, STURM EDWARD A, WODJENSKI MICHAEL J, HENDRIX BRYAN C, SWEENEY JOSEPH D, DUBOIS LAWRENCE H
Year of Publication 03.08.2018
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Year of Publication 03.08.2018
Patent
Adsorbents and fluid supply packages and apparatus comprising same
CARRUTHERS, J. DONALD, WODJENSKI, MICHAEL J, DUBOIS, LAWRENCE H, SWEENEY, JOSEPH D, STURM, EDWARD A, HENDRIX, BRYAN C, SCANNELL, CHRISTOPHER, BYL, OLEG, MARLOW, MATTHEW THOMAS, PETRUSKA, MELISSA A, WILSON, SHAUN M, DESPRES, JOSEPH R, TANG, YING, ELZER, DANIEL, MURTHI, KAVITA, LURCOTT, STEVEN M
Year of Publication 01.10.2017
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Year of Publication 01.10.2017
Patent