Cross coupled beams CMOS–MEMS resonator for VHF range with enhanced electrostatic detection
Marigó, E., Muñoz-Gamarra, J.L., Vidal, G., Giner, J., Torres, F., Uranga, A., Barniol, N.
Published in Microelectronic engineering (01.08.2011)
Published in Microelectronic engineering (01.08.2011)
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Journal Article
Conference Proceeding
Integration of NEMS resonators in a 65 nm CMOS technology
Munoz-Gamarra, J L, Alcaine, P, Marigo, E, Giner, J, Uranga, A, Esteve, J, Barniol, N
Published in Microelectronic engineering (01.10.2013)
Published in Microelectronic engineering (01.10.2013)
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Journal Article
VHF monolithically integrated CMOS-MEMS longitudinal bulk acoustic resonator
GINER, J, URANGA, A, MUNOZ-GAMARRA, J. L, MARIGO, E, BARNIOL, N
Published in Electronics letters (26.04.2012)
Published in Electronics letters (26.04.2012)
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Journal Article
A 230 MHz CMOS-MEMS bulk acoustic wave resonator
MARIGO FERRER, Eloi, MUNOZ-GAMARRA, J. L, GINER, J, URANGA, A, BARNIOL, N
Published in Microelectronic engineering (01.10.2012)
Published in Microelectronic engineering (01.10.2012)
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Conference Proceeding
Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories
Uranga, A., Verd, J., Marigó, E., Giner, J., Muñóz-Gamarra, J.L., Barniol, N.
Published in Sensors and actuators. A. Physical. (01.08.2013)
Published in Sensors and actuators. A. Physical. (01.08.2013)
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Journal Article
CMOS-MEMS switches based on back-end metal layers
Muñoz-Gamarra, J.L., Vidal-Álvarez, G., Torres, F., Uranga, A., Barniol, N.
Published in Microelectronic engineering (01.05.2014)
Published in Microelectronic engineering (01.05.2014)
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Journal Article
VHF monolithically integrated CMOS-MEMS longitudinal bulk acoustic resonator
Giner, J, Uranga, A, Muñoz-Gamarra, J L, Marigó, E, Barniol, N
Published in Electronics letters (26.04.2012)
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Published in Electronics letters (26.04.2012)
Journal Article
Characterization of CMOS-MEMS resonator by pulsed mode electrostatic actuation
Muñoz-Gamarra, J L, Marigó, E, Giner, J, Uranga, A, Torres, F, Barniol, N
Published in 2010 IEEE International Frequency Control Symposium (01.06.2010)
Published in 2010 IEEE International Frequency Control Symposium (01.06.2010)
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Conference Proceeding
CMOS-MEMS switches based on back-end metal layers
Munoz-Gamarra, J L, Vidal-Alvarez, G, Torres, F, Uranga, A, Barniol, N
Published in Microelectronic engineering (01.05.2014)
Published in Microelectronic engineering (01.05.2014)
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Journal Article
A CMOS-MEMS filter using a V-coupler and electrical phase inversion
Giner, J, Uranga, A, Torres, F, Marigo, E, Munoz Gamarra, J L, Barniol, N
Published in 2010 IEEE International Frequency Control Symposium (01.06.2010)
Published in 2010 IEEE International Frequency Control Symposium (01.06.2010)
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Conference Proceeding
Linear operation of a 11MHz CMOS-MEMS resonator
Marigó, E, Muñoz-Gamarra, J L, Giner, J, Lopez, J L, Torres, F, Uranga, A, Barniol, N, Verd, J
Published in 2010 IEEE International Frequency Control Symposium (01.06.2010)
Published in 2010 IEEE International Frequency Control Symposium (01.06.2010)
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Conference Proceeding
Analysis of a MEMS-based ring oscillator
Munoz-Gamarra, J. L., Barniol, N., Juillard, J.
Published in 2012 IEEE International Symposium on Circuits and Systems (ISCAS) (01.05.2012)
Published in 2012 IEEE International Symposium on Circuits and Systems (ISCAS) (01.05.2012)
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Conference Proceeding
NEMS switches for ultra-low-power digital logic: Challenges and opportunities
Munoz-Gamarra, J. L., Poulain, C., Ludurczak, W., Hentz, S., Hutin, L.
Published in 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO) (01.08.2016)
Published in 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO) (01.08.2016)
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Conference Proceeding
Balancing pull-in and adhesion stability margins in non-volatile NEM switches
Usai, G., Hutin, L., Sikder, U., Munoz-Gamarra, J. L., Ernst, T., Liu, T. J. King, Vinet, M.
Published in 2017 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) (01.10.2017)
Published in 2017 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) (01.10.2017)
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Conference Proceeding
Integration of NEMS resonators in a 65 nm CMOS technology : Nanofabrication 2012
MUÑOZ-GAMARRA, J. L, ALCAINE, P, MARIGÓ, E, GINER, J, URANGA, A, ESTEVE, J, BARNIOL, N
Published in Microelectronic engineering (2013)
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Published in Microelectronic engineering (2013)
Conference Proceeding