Experimental Study of In-Plane and Out-of-Plane Adhesions in Microelectromechanical Systems
Friedrich, T., Raudzis, C., Muller-Fiedler, R.
Published in Journal of microelectromechanical systems (01.12.2009)
Published in Journal of microelectromechanical systems (01.12.2009)
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Journal Article
Mechanical Reliability of MEMS-structures under shock load
Wagner, U., Franz, J., Schweiker, M., Bernhard, W., Müller-Fiedler, R., Michel, B., Paul, O.
Published in Microelectronics and reliability (01.09.2001)
Published in Microelectronics and reliability (01.09.2001)
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Journal Article
ORMOCER®s for optical interconnection technology
BUESTRICH, R, KAHLENBERG, F, POPALL, M, DANNBERG, P, MÜLLER-FIEDLER, R, RÖSCH, O
Published in Journal of sol-gel science and technology (01.02.2001)
Published in Journal of sol-gel science and technology (01.02.2001)
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Journal Article
Mechanical reliability of epipoly MEMS structures under shock load
Wagner, U., Muller-Fiedler, R., Bagdahn, J., Michel, B., Paul, O.
Published in TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) (2003)
Published in TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) (2003)
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Conference Proceeding
Reliability of micromachined membranes under particle impact
Wagner, U., Bernhard, W., Muller-Fiedler, R., Michel, B., Paul, O.
Published in TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) (2003)
Published in TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) (2003)
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Conference Proceeding
Millimeter-wave microelectromechanical (MEMS) switches for automotive surround sensing systems
Ulm, M., Schobel, J., Reimann, M., Buck, T., Dechow, J., Muller-Fiedler, R., Trah, H.-P., Kasper, E.
Published in 2003 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, 2003. Digest of Papers (2003)
Published in 2003 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, 2003. Digest of Papers (2003)
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Conference Proceeding
A four-point-bending-test for the stability assessment of glass frit bonded molded microsensors
Nötzold, K., Graf, J., Müller-Fiedler, R.
Published in Microelectronics and reliability (01.08.2008)
Published in Microelectronics and reliability (01.08.2008)
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Journal Article
Conference Proceeding
Hermeticity of eutectic bond layers for sensor packages on wafer-level
Schneider, A., Rank, H., Muller-Fiedler, R., Wittler, O., Reichl, H.
Published in 3rd Electronics System Integration Technology Conference ESTC (01.09.2010)
Published in 3rd Electronics System Integration Technology Conference ESTC (01.09.2010)
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Conference Proceeding
Double differential cross sections for electron impact ionisation of helium
Muller-Fiedler, R, Jung, K, Ehrhardt, H
Published in Journal of physics. B, Atomic and molecular physics (28.04.1986)
Published in Journal of physics. B, Atomic and molecular physics (28.04.1986)
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Journal Article
Reliability of MEMS - a methodical approach
Müller-Fiedler, R., Wagner, U., Bernhard, W.
Published in Microelectronics and reliability (01.09.2002)
Published in Microelectronics and reliability (01.09.2002)
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Journal Article
Reliability aspects of microsensors and micromechatronic actuators for automotive applications
Müller-Fiedler, Roland, Knoblauch, Volker
Published in Microelectronics and reliability (01.07.2003)
Published in Microelectronics and reliability (01.07.2003)
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Journal Article
High-cycle fatigue and strengthening in polycrystalline silicon
Boroch, Robert E., Müller-Fiedler, Roland, Bagdahn, Joerg, Gumbsch, Peter
Published in Scripta materialia (01.11.2008)
Published in Scripta materialia (01.11.2008)
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Journal Article
Inelastic differential electron scattering from metastable He(23S) atoms
Muller-Fiedler, R, Schlemmer, P, Jung, K, Hotop, H, Ehrhardt, H
Published in Journal of physics. B, Atomic and molecular physics (28.01.1984)
Published in Journal of physics. B, Atomic and molecular physics (28.01.1984)
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Journal Article
Gas diffusion barrier layers for transparent polymer packages for optical MEMS
Schmidt, M., Zinober, S., Müller-Fiedler, R., Müller, C., Reinecke, H.
Published in Procedia chemistry (01.09.2009)
Published in Procedia chemistry (01.09.2009)
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Journal Article
Erbium Doped Waveguide Amplifier in Glass Fabricated by a Hot-Pressing Technology
Graf, J., Sautter, H., Muller-Fiedler, R.
Published in CLEO/Europe Conference on Lasers and Electro-Optics (1998)
Published in CLEO/Europe Conference on Lasers and Electro-Optics (1998)
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Conference Proceeding
Fracture mechanical life-time investigation of glass frit-bonded sensors
Petzold, M., Dresbach, C., Ebert, M., Bagdahn, J., Wiemer, M., Glien, K., Graf, J., Muller-Fiedler, R., Hofer, H.
Published in Thermal and Thermomechanical Proceedings 10th Intersociety Conference on Phenomena in Electronics Systems, 2006. ITHERM 2006 (2006)
Published in Thermal and Thermomechanical Proceedings 10th Intersociety Conference on Phenomena in Electronics Systems, 2006. ITHERM 2006 (2006)
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Conference Proceeding
Vertical Silicon K-Band CPW Through-Wafer Interconnects
Reimann, M., Ulm, M., Buck, T., Muller-Fiedler, R., Heinrich, W.
Published in 2002 32nd European Microwave Conference (01.09.2002)
Published in 2002 32nd European Microwave Conference (01.09.2002)
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Conference Proceeding