Buried stacked capacitor cells for 16M and 64M DRAMS
Dietl, J, DoThanh, L, Kusters, K H, Kusztelan, L, Mulhoff, H M, Muller, W, Stelz, F X
Published in ESSDERC '90: 20th European Solid State Device Research Conference (01.09.1990)
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Published in ESSDERC '90: 20th European Solid State Device Research Conference (01.09.1990)
Conference Proceeding