음향 계측을 이용한 패턴화된 구조체의 특성화
KOTELYANSKII MICHAEL, MAIR ROBIN, MEHENDALE MANJUSHA, MUKUNDHAN PRIYA
Year of Publication 05.01.2023
Get full text
Year of Publication 05.01.2023
Patent
불투명한 층을 통한 정렬 및 오버레이 측정을 수행하기 위한 시스템 및 방법
MAIR ROBIN A, MEHENDALE MANJUSHA, MUKUNDHAN PRIYA, VOZZO FRANCIS C, ANTONELLI GEORGE ANDREW
Year of Publication 20.07.2023
Get full text
Year of Publication 20.07.2023
Patent
In-line process monitoring of advanced packaging process using Focused Beam Ellipsometry
Huang, Parker, Liu, YiYen, Chao, Jay, Lu, Chun Hung, Chen, Stephen, Chen, Jay, Shen, Fei, Ding, Jian, Mukundhan, Priya, Kryman, Timothy
Published in Microelectronic engineering (02.04.2015)
Published in Microelectronic engineering (02.04.2015)
Get full text
Journal Article
Applications of Picosecond Laser Acoustics to Power Semiconductor Device: IGBT and MOSFET
Dai, Johnny, Kim, Cheolkyu, Mukundhan, Priya
Published in 2023 China Semiconductor Technology International Conference (CSTIC) (26.06.2023)
Published in 2023 China Semiconductor Technology International Conference (CSTIC) (26.06.2023)
Get full text
Conference Proceeding
Copper process control with picosecond ultrasonic technology: A study
Manikonda, Shravanthi L., Medikonda, Manasa, Patel, Snehal, Bello, Abner, Jun Song, Mukundhan, Priya
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Get full text
Conference Proceeding
Journal Article
A New In-Line Laser-Based Acoustic Technique for Pillar Bump Metrology
Murray, Todd W., Bakir, Andrew, Stobbe, David M., Kotelyanskii, Michael J., Mair, Robin A., Mehendale, Manjusha, Ru, Xueping, Cohen, Jonathan D., Schulberg, Michelle T., Mukundhan, Priya, Kryman, Timothy J.
Published in Journal of microelectronics and electronic packaging (01.04.2016)
Published in Journal of microelectronics and electronic packaging (01.04.2016)
Get full text
Journal Article
Advantages of Picosecond Ultrasonic Technology for Advanced RF Metrology
Dai, Johnny, Mu, Johnny, Kim, Cheolkyu, Mukundhan, Priya
Published in 2021 China Semiconductor Technology International Conference (CSTIC) (14.03.2021)
Published in 2021 China Semiconductor Technology International Conference (CSTIC) (14.03.2021)
Get full text
Conference Proceeding
Full Metrology Solutions for Advanced RF with Picosecond Ultrasonic Metrology
Dai, Johnny, Mukundhan, Priya, Mu, Johnny, Zheng, Frank, Kim, Cheolkyu
Published in 2020 China Semiconductor Technology International Conference (CSTIC) (26.06.2020)
Published in 2020 China Semiconductor Technology International Conference (CSTIC) (26.06.2020)
Get full text
Conference Proceeding
Characterization of patterned structures using acoustic metrology
Mehendale, Manjusha, Kotelyanskii, Michael, Mair, Robin, Mukundhan, Priya
Year of Publication 21.05.2024
Get full text
Year of Publication 21.05.2024
Patent
SYSTEM AND METHOD FOR PERFORMING CHARACTERIZATION OF A SAMPLE
MEHENDALE, Manjusha, ANTONELLI, George Andrew, MUKUNDHAN, Priya, MAIR, Robin A
Year of Publication 05.10.2023
Get full text
Year of Publication 05.10.2023
Patent
Monitoring Critical Process Steps in 3D NAND using Picosecond Ultrasonic Metrology with both Thickness and Sound Velocity Capabilities
Dai, Johnny, Mukundhan, Priya, Mair, Robin, Mehendale, Manjusha, Wang, Calvin, Wang, Ewen, Kim, Cheolkyu
Published in 2020 China Semiconductor Technology International Conference (CSTIC) (26.06.2020)
Published in 2020 China Semiconductor Technology International Conference (CSTIC) (26.06.2020)
Get full text
Conference Proceeding
CHARACTERIZATION OF PATTERNED STRUCTURES USING ACOUSTIC METROLOGY
MEHENDALE, Manjusha, MUKUNDHAN, Priya, MAIR, Robin, KOTELYANSKII, Michael
Year of Publication 21.10.2021
Get full text
Year of Publication 21.10.2021
Patent
CHARACTERIZATION OF PATTERNED STRUCTURES USING ACOUSTIC METROLOGY
Mehendale, Manjusha, Kotelyanskii, Michael, Mair, Robin, Mukundhan, Priya
Year of Publication 14.10.2021
Get full text
Year of Publication 14.10.2021
Patent
A METHOD AND A SENSOR ADJUSTMENT MECHANISM FOR POSITION SENSITIVE DETECTION
MEHENDALE, Manjusha, ZHOU, Wei, MUKUNDHAN, Priya, COLGAN, Michael, KOTELYANSKII, Michael
Year of Publication 09.09.2020
Get full text
Year of Publication 09.09.2020
Patent
Monitoring critical process steps in 3D nand and advanced RF using picosecond ultrasonic metrology
Dai, Johnny, Mair, Robin, Park, Kwansoon, Zeng, Xinglin, Mukundhan, Priya, Kim, Cheolkyu, Kryman, Tim
Published in 2018 China Semiconductor Technology International Conference (CSTIC) (01.03.2018)
Published in 2018 China Semiconductor Technology International Conference (CSTIC) (01.03.2018)
Get full text
Conference Proceeding
Oxidation Studies of Aluminum-Implanted NBD 200 Silicon Nitride
Mukundhan, Priya, Du, Henry H., Withrow, Stephen P.
Published in Journal of the American Ceramic Society (01.04.2002)
Published in Journal of the American Ceramic Society (01.04.2002)
Get full text
Journal Article